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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 15 — Jul. 21, 2008
  • pp: 11289–11293

Terahertz profilometry at 600 GHz with 0.5 μm depth resolution

Bernd Hils, Mark D. Thomson, Torsten Löffler, Wolff von Spiegel, Christian am Weg, Hartmut G. Roskos, Peter de Maagt, Dominic Doyle, and Ralf D. Geckeler  »View Author Affiliations

Optics Express, Vol. 16, Issue 15, pp. 11289-11293 (2008)

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Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 μm.

© 2008 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(110.6795) Imaging systems : Terahertz imaging

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 2, 2008
Revised Manuscript: June 20, 2008
Manuscript Accepted: June 20, 2008
Published: July 11, 2008

Bernhard Hils, Mark D. Thomson, Torsten Löffler, Wolff von Spiegel, Christian am Weg, Hartmut G. Roskos, Peter de Maagt, Dominic Doyle, and Ralf D. Geckeler, "Terahertz profilometry at 600 GHz with 0.5 μm depth resolution," Opt. Express 16, 11289-11293 (2008)

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