OSA's Digital Library

Optics Express

Optics Express

  • Vol. 16, Iss. 16 — Aug. 4, 2008
  • pp: 12008–12017

Manufacturing of an absorbing filter controlled by a broadband optical monitoring

Bruno Badoil, Fabien Lemarchand, Michel Cathelinaud, and Michel Lequime  »View Author Affiliations


Optics Express, Vol. 16, Issue 16, pp. 12008-12017 (2008)
http://dx.doi.org/10.1364/OE.16.012008


View Full Text Article

Enhanced HTML    Acrobat PDF (380 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This paper deals with a broadband optical monitoring set up useful for the manufacturing of absorbing coatings. The monitoring strategy consists in simultaneous measurements of transmittance and reflectance over a large spectral range. The resulting analysis allows then to determine the real time deposited thickness. A stage of design correction is possible after the deposition and analysis of each layer. This method has potential for thin metallic layers coatings. We then describe layer after layer the strategy for the control and manufacturing of a filter with given colorimetric properties.

© 2008 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3915) Thin films : Metallic, opaque, and absorbing coatings

ToC Category:
Thin Films

History
Original Manuscript: October 11, 2007
Revised Manuscript: January 28, 2008
Manuscript Accepted: April 4, 2008
Published: July 25, 2008

Citation
Bruno Badoil, Fabien Lemarchand, Michel Cathelinaud, and Michel Lequime, "Manufacturing of an absorbing filter controlled with a broadband optical monitoring," Opt. Express 16, 12008-12017 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-16-12008


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. B. T. Sullivan and J. A. Dobrowolski, "Deposition error compensation for optical multilayer coatings. II. Experimental results - sputtering system," Appl. Opt. 32, 2351-2360 (1993). [CrossRef] [PubMed]
  2. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, "Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring," Appl. Opt. 45, 7026-7034 (2006). [CrossRef] [PubMed]
  3. L. Li and Y. Yen, "Wideband monitoring and measuring system for optical coatings," Appl. Opt. 28, 2890-2894 (1989). [CrossRef]
  4. A. V. Tikhonravov and M. K. Trubetskov, "On-line characterization and reoptimization of optical coatings," Proc. SPIE 5250, 406-413 (2004). [CrossRef]
  5. D. Ristau, T. Gross, and M. Lappschies, "Optical broadband monitoring of conventional and ion process," in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE1 (2004).
  6. M. Lappschies, B. Goertz, and D. Ristau, "Application of optical broadband monitoring to quasi rugate filter by ion beam sputtering," in Digest of Optical Interference Coatings (Optical Society of America), paper TuE4 (2004).
  7. S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, "In situ broadband monitoring and characterization of optical coatings," in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).
  8. B. T. Sullivan and K. L. Byrt, "Metal/dielectric transmission interference filters with low reflectance. 2. Experimental results," Appl. Opt. 34, 5684-5694 (1995). [CrossRef] [PubMed]
  9. B. Badoil, F. Lemarchand, M. Cathelinaud and M. Lequime, "Interest of broadband optical monitoring for thin film filters manufacturing," Appl. Opt. 46, 4294-4303 (2007). [CrossRef] [PubMed]
  10. S.D. Browning, J.A. Dobrowolski, "2007 OSA Topical meeting on Optical Interference Coatings manufacturing problem," paper MB1 (2007).
  11. J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, "2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem," Appl. Opt. 47, 231-245 (2008). [CrossRef]
  12. O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, "Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method," Proc. SPIE 3094, 250-254 (1997). [CrossRef]
  13. A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, "Optical characterization of thin metal films," in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).
  14. T. Csendes, B. Daroczy, and Z. Hantos, "Nonlinear parameter estimation by global optimization: comparison of local search methods in respiratory system modelling, System Modelling and Optimization," (Springer-Verlag, Berlin 1986) 188-192.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Multimedia

Multimedia FilesRecommended Software
» Media 1: GIF (45 KB)      QuickTime
» Media 2: GIF (39 KB)      QuickTime

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited