Integration of hybrid silicon lasers and electroabsorption modulators

doi:10.1364/OE.16.012478

Integration of hybrid silicon lasers and electroabsorption modulators

Matthew N. Sysak, Joel O. Anthes, John E. Bowers, Omri Raday, and Richard Jones »View Author Affiliations

Optics Express, Vol. 16, Issue 17, pp. 12478-12486 (2008)
http://dx.doi.org/10.1364/OE.16.012478

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Abstract

We present an integration platform based on quantum well intermixing for multi-section hybrid silicon lasers and electroabsorption modulators. As a demonstration of the technology, we have fabricated discrete sampled grating DBR lasers and sampled grating DBR lasers integrated with InGaAsP/InP electroabsorption modulators. The integrated sampled grating DBR laser-modulators use the as-grown III–V bandgap for optical gain, a 50 nm blue shifted bandgap for the electrabosprtion modulators, and an 80 nm blue shifted bandgap for low loss mirrors. Laser continuous wave operation up to 45 °C is achieved with output power >1.0 mW and threshold current of <50 mA. The modulator bandwidth is >2GHz with 5 dB DC extinction.

OCIS Codes
(060.2330) Fiber optics and optical communications : Fiber optics communications
(060.2340) Fiber optics and optical communications : Fiber optics components

ToC Category:
Fiber Optics and Optical Communications

History
Original Manuscript: May 30, 2008
Revised Manuscript: July 24, 2008
Manuscript Accepted: July 25, 2008
Published: August 4, 2008

Citation
Matthew N. Sysak, Joel O. Anthes, John E. Bowers, Omri Raday, and Richard Jones, "Integration of hybrid silicon lasers and electroabsorption modulators," Opt. Express 16, 12478-12486 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-17-12478

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References

H. Rong, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005). [CrossRef] [PubMed]
S. G. Cloutier, P. A. Kossyrev, and J. Xu, "Optical gain & stimulated emission in periodic nanopatterned crystalline silicon," Nat. Mater. 4, 887 (2005). [CrossRef] [PubMed]
S. Lombardo, "A Room-temperature luminescence from Er3+-implanted semi-insulating polycrystalline silicon," Appl. Phys. Lett. 63, 1942-1944 (1993). [CrossRef]
A. W. Fang, R. Jones, H. Park, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, "Integrated AlGaInAs-silicon evanescent race track laser and photodetector," Opt. Express 5, 2315-2322, (2007). [CrossRef]
A. W. Fang, E. Lively, Y.-H. Kuo, D. Liang, and J. E. Bowers, "Distributed Feedback Silicon Evanescent Laser," OFC/NFOEC, postdeadline session PDP15, 2008.
V , Jayaraman, Z. Chuang, and L. A. Coldren, "Theory, Design, and Performance of Extended Tuning Range Semiconductor Lasers with Sampled Gratings," IEEE J. Quantum Electron. 29, 1824-1834 (1993). [CrossRef]
E. J. Skogen, J. S. Barton, S. P. Denbaars, and L. A. Coldren, "A Quantum-Well-Intermixing Process for Wavelength-Agile Photonic Integrated Circuits," J. Sel. Top. Quantum Electron. 8, 863-869 (2002). [CrossRef]
E. Skogen, "Quantum Well Intermixing for Wavelength Agile Photonic Integrated Circuits," PhD. Thesis University of California Santa Barbara, (2003).
D. Nie, T. Mei, H. S. Djie, M. K. Chin, X. H. Tang, and Y. X. Wang, "Implementing multiple bandgaps using inductively coupled argon plasma enhanced quantum well intermixing," J. Vac. Sci. Technol. B 23,1050-1053 (2005). [CrossRef]
H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Pannicia, and J. E. Bowers, "A hybrid AlGaInAs-silicon evanescent preamplifier and photodetector," Opt. Express 15, 13539-13546 (2007). [CrossRef] [PubMed]
M-C Amann, J. Buus, Tunable Laser Diodes (Artech House 1998).
M. N. Sysak, H. Park, A. W. Fang, J. E. Bowers, R. Jones, O. Cohen, O. Raday, and M. Paniccia, "Experimental and theoretical thermal analysis of a Hybrid Silicon Evanescent Laser," Opt. Express 15, 15041-15046 (2007). [CrossRef] [PubMed]
M-C Amann, S. Illek, C. Schanen, and W. Thulke, "Tunable twin-guide laser: A novel aser diode with improved tuning performance," Appl. Phys. Lett. 54, 2532-2533 (1989). [CrossRef]
Y.-H. Kuo, H.-W. Chen, and J. E. Bowers, "A hybrid silicon evanescent electroabsorption modulator," OFC 2008, San Diego, CA, (2008).

Appl. Phys. Lett.

S. Lombardo, "A Room-temperature luminescence from Er3+-implanted semi-insulating polycrystalline silicon," Appl. Phys. Lett. 63, 1942-1944 (1993). [CrossRef]
M-C Amann, S. Illek, C. Schanen, and W. Thulke, "Tunable twin-guide laser: A novel aser diode with improved tuning performance," Appl. Phys. Lett. 54, 2532-2533 (1989). [CrossRef]

IEEE J. Quantum Electron.

V , Jayaraman, Z. Chuang, and L. A. Coldren, "Theory, Design, and Performance of Extended Tuning Range Semiconductor Lasers with Sampled Gratings," IEEE J. Quantum Electron. 29, 1824-1834 (1993). [CrossRef]

J. Sel. Top. Quantum Electron.

E. J. Skogen, J. S. Barton, S. P. Denbaars, and L. A. Coldren, "A Quantum-Well-Intermixing Process for Wavelength-Agile Photonic Integrated Circuits," J. Sel. Top. Quantum Electron. 8, 863-869 (2002). [CrossRef]

J. Vac. Sci. Technol. B

D. Nie, T. Mei, H. S. Djie, M. K. Chin, X. H. Tang, and Y. X. Wang, "Implementing multiple bandgaps using inductively coupled argon plasma enhanced quantum well intermixing," J. Vac. Sci. Technol. B 23,1050-1053 (2005). [CrossRef]

Nat. Mater.

S. G. Cloutier, P. A. Kossyrev, and J. Xu, "Optical gain & stimulated emission in periodic nanopatterned crystalline silicon," Nat. Mater. 4, 887 (2005). [CrossRef] [PubMed]

Nature

H. Rong, "A continuous-wave Raman silicon laser," Nature 433, 725-728 (2005). [CrossRef] [PubMed]

Opt. Express

A. W. Fang, R. Jones, H. Park, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, "Integrated AlGaInAs-silicon evanescent race track laser and photodetector," Opt. Express 5, 2315-2322, (2007). [CrossRef]
H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Pannicia, and J. E. Bowers, "A hybrid AlGaInAs-silicon evanescent preamplifier and photodetector," Opt. Express 15, 13539-13546 (2007). [CrossRef] [PubMed]
M. N. Sysak, H. Park, A. W. Fang, J. E. Bowers, R. Jones, O. Cohen, O. Raday, and M. Paniccia, "Experimental and theoretical thermal analysis of a Hybrid Silicon Evanescent Laser," Opt. Express 15, 15041-15046 (2007). [CrossRef] [PubMed]

Other

Y.-H. Kuo, H.-W. Chen, and J. E. Bowers, "A hybrid silicon evanescent electroabsorption modulator," OFC 2008, San Diego, CA, (2008).
M-C Amann, J. Buus, Tunable Laser Diodes (Artech House 1998).
E. Skogen, "Quantum Well Intermixing for Wavelength Agile Photonic Integrated Circuits," PhD. Thesis University of California Santa Barbara, (2003).
A. W. Fang, E. Lively, Y.-H. Kuo, D. Liang, and J. E. Bowers, "Distributed Feedback Silicon Evanescent Laser," OFC/NFOEC, postdeadline session PDP15, 2008.

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