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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 18 — Sep. 1, 2008
  • pp: 14044–14056

Multi-level diffractive optical elements produced by excimer laser ablation of sol-gel

Estelle Neiss, Manuel Flury, Loïc Mager, Jean-Luc Rehspringer, Alain Fort, Paul Montgomery, Philippe Gérard, Joël Fontaine, and Stéphane Robert  »View Author Affiliations

Optics Express, Vol. 16, Issue 18, pp. 14044-14056 (2008)

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Material ablation by excimer laser micromachining is a promising approach for structuring sol-gel materials as we demonstrate in the present study. Using the well-known direct etching technique, the behaviour of different hybrid organic/inorganic self-made sol-gel materials is examined with a KrF* laser. Ablated depths ranging from 0.1 to 1.5 µm are obtained with a few laser pulses at low fluence (<1 J/cm2). The aim is to rapidly transfer surface relief multi-level diffractive patterns in such a substrate, without intermediate steps. The combination with the 3D profilometry technique of coherence probe microscopy permits to analyse the etching process with the aim of producing multi-level Diffractive Optical Elements (DOE). Examples of four-level DOEs with 10 µm square elementary cells are presented, as well as their laser reconstructions in the infrared.

© 2008 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(140.2180) Lasers and laser optics : Excimer lasers
(140.3390) Lasers and laser optics : Laser materials processing
(160.6060) Materials : Solgel
(230.4000) Optical devices : Microstructure fabrication
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Diffraction and Gratings

Original Manuscript: March 14, 2008
Revised Manuscript: May 11, 2008
Manuscript Accepted: May 15, 2008
Published: August 26, 2008

Estelle Neiss, Manuel Flury, Loïc Mager, Jean-Luc Rehspringer, Alain Fort, Paul Montgomery, Philippe Gérard, Joël Fontaine, and Stéphane Robert, "Multi-level diffractive optical elements produced by excimer laser ablation of sol-gel," Opt. Express 16, 14044-14056 (2008)

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