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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 19 — Sep. 15, 2008
  • pp: 14397–14403

Superlens nano-patterning technology based on the distributed Polystyrene spheres

Shuhong Li, Chunlei Du, Xiaochun Dong, Lifang Shi, Xiangang Luo, Xingzhan Wei, and Yudong Zhang  »View Author Affiliations


Optics Express, Vol. 16, Issue 19, pp. 14397-14403 (2008)
http://dx.doi.org/10.1364/OE.16.014397


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Abstract

Based on surface plasmon resonant enhancement, a method to realize photolithography beyond diffraction limit by using polystyrene spheres (PSs) self-assembled on silver slab was proposed in this paper. The optimum parameters for PS with different diameters were presented. In order to verify this method, numerical simulation on a typical configuration with 1.5µm diameter of PS was carried out by using the finite-difference time-domain (FDTD) method, and the minimum feature size of 88nm beyond diffraction limit at 365nm working wavelength was obtained.

© 2008 Optical Society of America

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(230.7370) Optical devices : Waveguides
(240.6680) Optics at surfaces : Surface plasmons

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 18, 2008
Revised Manuscript: August 16, 2008
Manuscript Accepted: August 16, 2008
Published: August 29, 2008

Citation
Shuhong Li, Chunlei Du, Xiaochun Dong, Lifang Shi, Xiangang Luo, Xingzhan Wei, and Yudong Zhang, "Superlens nano-patterning technology based on the distributed Polystyrene spheres," Opt. Express 16, 14397-14403 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-19-14397


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