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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 19 — Sep. 15, 2008
  • pp: 14761–14770

Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment

Ying Liu, Xin Tan, Zhengkun Liu, Xiangdong Xu, Yilin Hong, and Shaojun Fu  »View Author Affiliations

Optics Express, Vol. 16, Issue 19, pp. 14761-14770 (2008)

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Grating beam splitters have been fabricated for soft X-ray Mach-Zehnder interferometer using holographic interference lithography. The grating beam splitter consists of two gratings, one works at X-ray laser wavelength of 13.9 nm with the spatial frequency of 1000 lines/mm as the operation grating, the other works at visible wavelength of 632.8 nm for pre-aligning the X-ray interferometer with the spatial frequency of 22 lines/mm as the pre-alignment grating. The two gratings lie vertically on the same substrate. The main feature of the beam splitter is the use of lowspatial-frequency beat grating of a holographic double frequency grating as the pre-alignment grating of the X-ray interferometer. The grating line parallelism between the two gratings can be judged by observing the diffraction patterns of the pre-alignment grating directly.

© 2008 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(090.2890) Holography : Holographic optical elements
(230.1360) Optical devices : Beam splitters
(230.1950) Optical devices : Diffraction gratings
(340.0340) X-ray optics : X-ray optics
(340.7450) X-ray optics : X-ray interferometry

ToC Category:
X-ray Optics

Original Manuscript: June 13, 2008
Revised Manuscript: August 14, 2008
Manuscript Accepted: August 23, 2008
Published: September 4, 2008

Ying Liu, Xin Tan, Zhengkun Liu, Xiangdong Xu, Yilin Hong, and Shaojun Fu, "Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment," Opt. Express 16, 14761-14770 (2008)

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