Sensitivity dependences on side length and aspect ratio of a diaphragm in a glass-based guided-wave optical pressure sensor
Optics Express, Vol. 16, Issue 19, pp. 15024-15032 (2008)
http://dx.doi.org/10.1364/OE.16.015024
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Abstract
According to our previous theoretical study, sensor sensitivity is proportional to the cube of the side length of the diaphragm in a guided-wave optical pressure sensor consisting of a glass diaphragm and a single-mode waveguide on the diaphragm. Also, to obtain higher sensitivity, an aspect ratio of the diaphragm should be approximately 1 for two waveguide positions: the center and the edge of the diaphragm. In this study, sensitivity dependences on side length and aspect ratio of the diaphragm were experimentally examined. The obtained experimental results strongly supported the theoretical predictions.
© 2008 Optical Society of America
OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.3120) Optical devices : Integrated optics devices
(230.7370) Optical devices : Waveguides
ToC Category:
Integrated Optics
History
Original Manuscript: July 16, 2008
Revised Manuscript: August 29, 2008
Manuscript Accepted: September 1, 2008
Published: September 9, 2008
Citation
Hiroyuki Nikkuni, Yu Watanabe, Masashi Ohkawa, and Takashi Sato, "Sensitivity dependences on side length and aspect
ratio of a diaphragm in a glass-based guided-wave
optical pressure sensor," Opt. Express 16, 15024-15032 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-19-15024
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