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Optics Express

Optics Express

  • Editor: Martijn de Sterke
  • Vol. 16, Iss. 20 — Sep. 29, 2008
  • pp: 15402–15414

Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals

Debashis Chanda, Ladan E. Abolghasemi, Moez Haque, Mi Li Ng, and Peter R. Herman  »View Author Affiliations

Optics Express, Vol. 16, Issue 20, pp. 15402-15414 (2008)

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We present a novel multi-level diffractive optical element for diffractive optic near-field lithography based fabrication of large-area diamond-like photonic crystal structure in a single laser exposure step. A multi-level single-surface phase element was laser fabricated on a thin polymer film by two-photon polymerization. A quarter-period phase shift was designed into the phase elements to generate a 3D periodic intensity distribution of double basis diamond-like structure. Finite difference time domain calculation of near-field diffraction patterns and associated isointensity surfaces are corroborated by definitive demonstration of a diamond-like woodpile structure formed inside thick photoresist. A large number of layers provided a strong stopband in the telecom band that matched predictions of numerical band calculation. SEM and spectral observations indicate good structural uniformity over large exposure area that promises 3D photonic crystal devices with high optical quality for a wide range of motif shapes and symmetries. Optical sensing is demonstrated by spectral shifts of the Γ-Z stopband under liquid emersion.

© 2008 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(050.5080) Diffraction and gratings : Phase shift
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.5082) Diffraction and gratings : Phase space in wave options
(050.5298) Diffraction and gratings : Photonic crystals
(050.6875) Diffraction and gratings : Three-dimensional fabrication

ToC Category:
Photonic Crystals

Original Manuscript: August 4, 2008
Revised Manuscript: August 29, 2008
Manuscript Accepted: August 31, 2008
Published: September 15, 2008

Debashis Chanda, Ladan E. Abolghasemi, Moez Haque, Mi Li Ng, and Peter R. Herman, "Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals," Opt. Express 16, 15402-15414 (2008)

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