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Optics Express

Optics Express

  • Editor: Martijn de Sterke
  • Vol. 16, Iss. 20 — Sep. 29, 2008
  • pp: 15531–15539

Dichroic rugate filters based on birefringent porous silicon

Nobuyuki Ishikura, Minoru Fujii, Kohei Nishida, Shinji Hayashi, and Joachim Diener  »View Author Affiliations

Optics Express, Vol. 16, Issue 20, pp. 15531-15539 (2008)

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Rugate filters made of anisotropically nanostructured birefringent silicon have been fabricated and studied by polarization-resolved transmission measurements. Electrochemical etching of a (110) oriented Si wafer results in porous silicon layers which exhibit a strong in-plane birefringence. We demonstrate that a sinusoidal refractive index variation of birefringent porous silicon combined with index-matching layers and apodization results in a dichroic rugate filter having a stop-band dependent on the polarization direction of the incident light without higher-order harmonics and sidelobes. We also demonstrate that the combination of different dichroic rugate filters allow us to realize filters with more complex properties in a single preparation step.

© 2008 Optical Society of America

OCIS Codes
(160.6000) Materials : Semiconductor materials
(220.4610) Optical design and fabrication : Optical fabrication
(230.4170) Optical devices : Multilayers
(260.1440) Physical optics : Birefringence
(350.2460) Other areas of optics : Filters, interference

ToC Category:
Optical Devices

Original Manuscript: July 30, 2008
Revised Manuscript: September 7, 2008
Manuscript Accepted: September 13, 2008
Published: September 17, 2008

Nobuyuki Ishikura, Minoru Fujii, Kohei Nishida, Shinji Hayashi, and Joachim Diener, "Dichroic rugate filters based on birefringent porous silicon," Opt. Express 16, 15531-15539 (2008)

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