OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 22 — Oct. 27, 2008
  • pp: 17237–17242

Vertical multiple-slot waveguide ring resonators in silicon nitride

Laurent Vivien, Delphine Marris-Morini, Amadeu Griol, Kristinn B. Gylfason, Daniel Hill, Jesús Álvarez, Hans Sohlström, Juan Hurtado, David Bouville, and Eric Cassan  »View Author Affiliations

Optics Express, Vol. 16, Issue 22, pp. 17237-17242 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (1117 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 µm, 90 µm and 110 µm) have been carried out for TE and TM polarizations at the wavelength of 1.3 µm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

© 2008 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3120) Integrated optics : Integrated optics devices
(230.0230) Optical devices : Optical devices
(230.7370) Optical devices : Waveguides
(070.5753) Fourier optics and signal processing : Resonators

ToC Category:
Integrated Optics

Original Manuscript: June 30, 2008
Revised Manuscript: August 11, 2008
Manuscript Accepted: August 12, 2008
Published: October 13, 2008

Laurent Vivien, Delphine Marris-Morini, Amadeu Griol, Kristinn B. Gylfason, Daniel Hill, Jesús Alvarez, Hans Sohlström, Juan Hurtado, David Bouville, and Eric Cassan, "Vertical multiple-slot waveguide ring resonators in silicon nitride," Opt. Express 16, 17237-17242 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouk, M. Heitzmann, N. Bouaida, and L. Mollard, "Low-loss sub-micrometer SOI rib waveguides and corner mirrors," Opt. Lett. 28, 1150-1152 (2003). [CrossRef] [PubMed]
  2. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett 16, 1328-1330 (2004). [CrossRef]
  3. V. Almeida, Q. Xu, C.A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure," Opt. Lett. 29, 1209-1211 (2004) [CrossRef] [PubMed]
  4. T. Baehr-Jones, M. Hochberg, C. Walker, and Scherer, "High-Q optical resonators in silicon-on-insulator-based slot waveguides," Appl. Phys. Lett. 86, 081101 (2005). [CrossRef]
  5. H. G. Yoo, Y. Fu, D. Riley, J. H. Shin, and P. M. Fauchet, "Birefringence and optical power confinement in horizontal multi-slot waveguides made of Si and SiO2," Opt. Express 16, 8623-8628 (2008). [CrossRef] [PubMed]
  6. R. Sun, P. Dong, N-N. Feng, C-Y Hong, J. Michel, M. Lipson, and L. Kimerling, "Horizontal single and multiple slot waveguides : optical transmission at λ=1550nm," Opt. Express 15, 17967-17972 (2007). [CrossRef] [PubMed]
  7. C. A. Barrios, B. Sànchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquet, "Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform," Opt. Express 15, 6846-6857 (2007). [CrossRef] [PubMed]
  8. C. A. Barrios, M. J. Bañuls, V. Gonzàlez-Pedro, K. B. Gylfason, B. Sànchez, A. Griol, A. Maquieira, H. Sohlström, M. Holgado, and R. Casquet, "Label-free optical biosensing with slot-waveguides," Opt. Lett. 33, 708-710 (2008). [CrossRef] [PubMed]
  9. U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, "Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability," Phys. Rev. Lett.  98, 243.901 (2007). [CrossRef]
  10. S-H Yang, M. L. Cooper, P. R. Bandaru, and S. Mookherjea, "Giant birefringence in multi-slotted silicon nanophotonic waveguides," Opt. Express 16, 8306-8316 (2008). [CrossRef] [PubMed]
  11. X. Tu, X Xu, S. Chen, J. Yu, and Q. Wang, "Simulation demonstration and experimental fabrication of multiple-slot waveguide," IEEE Phot. Techn. Lett. 20, 333-335 (2008). [CrossRef]
  12. PhotonDesign: URL: www.photonDesign.com
  13. A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited