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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 23 — Nov. 10, 2008
  • pp: 19179–19191

Deep microstructure topography characterization with optical vortex interferometer

Jan Masajada, Monika Leniec, Elżbieta Jankowska, Hugo Thienpont, Heidi Ottevaere, and Virginia Gomez  »View Author Affiliations


Optics Express, Vol. 16, Issue 23, pp. 19179-19191 (2008)
http://dx.doi.org/10.1364/OE.16.019179


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Abstract

We report on a new method of inspecting deep microstructures manufactured in transparent media. Although their lateral dimension (tens of microns) do not exceed the diffraction limit for optical microscopy resolution, their deepness makes the nondestructive measurements practically impossible with presently available methods. We show that the optical vortex interferometer with a vortex generator can be used to differentiate between the samples of good and poor quality. The measurement system is simple and the interpretation of the results is straightforward.

© 2008 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(260.1960) Physical optics : Diffraction theory

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 31, 2008
Revised Manuscript: September 12, 2008
Manuscript Accepted: October 21, 2008
Published: November 5, 2008

Citation
Jan Masajada, Monika Leniec, Elzbieta Jankowska, Hugo Thienpont, Heidi Ottevaere, and Virginia Gomez, "Deep microstructure topography characterization with optical vortex interferometer," Opt. Express 16, 19179-19191 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-23-19179


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