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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 24 — Nov. 24, 2008
  • pp: 19541–19549

Two step process for the fabrication of diffraction limited concave microlens arrays

Patrick Ruffieux, Toralf Scharf, Irène Philipoussis, Hans Peter Herzig, Reinhard Voelkel, and Kenneth J. Weible  »View Author Affiliations

Optics Express, Vol. 16, Issue 24, pp. 19541-19549 (2008)

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A two step process has been developed for the fabrication of diffraction limited concave microlens arrays. The process is based on the photoresist filling of melted holes obtained by a preliminary photolithography step. The quality of these microlenses has been tested in a Mach-Zehnder interferometer. The method allows the fabrication of concave microlens arrays with diffraction limited optical performance. Concave microlenses with diameters ranging between 30 µm to 230 µm and numerical apertures up to 0.25 have been demonstrated. As an example, we present the realization of diffusers obtained with random sizes and locations of concave shapes.

© 2008 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(220.0220) Optical design and fabrication : Optical design and fabrication

ToC Category:
Optical Design and Fabrication

Original Manuscript: September 29, 2008
Revised Manuscript: October 31, 2008
Manuscript Accepted: November 2, 2008
Published: November 11, 2008

Patrick Ruffieux, Toralf Scharf, Irène Philipoussis, Hans Peter Herzig, Reinhard Voelkel, and Kenneth J. Weible, "Two step process for the fabrication of diffraction limited concave microlens arrays," Opt. Express 16, 19541-19549 (2008)

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