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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 26 — Dec. 22, 2008
  • pp: 21662–21670

High-contrast waveguides in sputtered pure TeO2 glass thin films

Silvia Maria Pietralunga, Marta Lanata, Massimo Ferè, Davide Piccinin, Giuseppe Cusmai, Matteo Torregiani, and Mario Martinelli  »View Author Affiliations

Optics Express, Vol. 16, Issue 26, pp. 21662-21670 (2008)

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We present a technological approach to the realization of channeled optical waveguides, starting from reactively sputtered tellurite glass thin films, grown on silica-coated 4” Si wafers. In particular, optical lithographic process and etching recipes have been developed to overcome the solubility of TeO2 films in aqueous solutions, and to process them into high-index contrast structures with minimized post-etch roughness. Optical tests on preliminary rib waveguide geometries feature 6.3 dB/cm propagation loss for fundamental TE mode at λ=1.5 µm.

© 2008 Optical Society of America

OCIS Codes
(130.3130) Integrated optics : Integrated optics materials
(160.2750) Materials : Glass and other amorphous materials
(230.7390) Optical devices : Waveguides, planar
(130.2755) Integrated optics : Glass waveguides

ToC Category:
Integrated Optics

Original Manuscript: September 24, 2008
Revised Manuscript: December 4, 2008
Manuscript Accepted: December 11, 2008
Published: December 16, 2008

Silvia Maria Pietralunga, Marta Lanata, Massimo Feré, Davide Piccinin, Giuseppe Cusmai, Matteo Torregiani, and Mario Martinelli, "High-contrast waveguides in sputtered pure TeO,2 glass thin films," Opt. Express 16, 21662-21670 (2008)

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