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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 3 — Feb. 4, 2008
  • pp: 1497–1506

Picometer positioning system based on a zooming interferometer using a femtosecond optical comb

Mariko Kajima and Hirokazu Matsumoto  »View Author Affiliations


Optics Express, Vol. 16, Issue 3, pp. 1497-1506 (2008)
http://dx.doi.org/10.1364/OE.16.001497


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Abstract

A positioning system based on a new zooming interferometer was developed for calibrating ultrahigh-resolution linear encoders. In the system, the positioning resolution is scaled down from that of the driving stage to that of the controlled stage by a zooming ratio that is determined by the ratio bettween the wavelengths of the optical sources for the zooming interferometer, so that the resolution in the controlled stage becomes very high. A femtosecond optical comb is used to stabilize two external-cavity diode lasers that are used as optical sources for the interferometer. The system realized a resolution of better than 30 pm and a stability of 1 nm.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: November 26, 2007
Revised Manuscript: January 16, 2008
Manuscript Accepted: January 17, 2008
Published: January 22, 2008

Citation
Mariko Kajima and Hirokazu Matsumoto, "Picometer positioning system based on a zooming interferometer using a femtosecond optical comb," Opt. Express 16, 1497-1506 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-3-1497


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References

  1. G. Basile, P. Becker, A. Bergamin, G. Cavagnero, A. Franks, K. Jackson, U. Kuetgens, G. Mana, E. W. Palmer, C. J. Robbie, M. Stedman, J. Stümpel, A. Yacoot, and G. Zosi, "Combined optical and X-ray interferometry for high-precision dimensional metrology," Proc. R. Soc. London, Ser. A 456, 701-729 (2000). [CrossRef]
  2. C. M. Wu and R. D. Deslattes, "Analytical modeling of the periodic nonlinearity in heterodyne interferometry," Appl. Opt. 37,6696-6700 (1998). [CrossRef]
  3. N. Bobroff, "Recent advances in displacement measuring interferometry," Meas. Sci. Technol. 4, 907-926 (1993). [CrossRef]
  4. L. Chassagne, S. Topcu, Y. Alayli, and P. Juncar, "Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics," Meas. Sci. Technol. 16, 1771-1777 (2005). [CrossRef]
  5. J. Lawall and E. Kessler, "Michelson interferometry with 10 pm accuracy," Rev. Sci. Instrum. 71, 2669-2676 (2000). [CrossRef]
  6. S. Topcu, L. Chassagne, Y. Alayli, and P. Juncar, "Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques," Opt. Commun. 247, 133-139 (2005). [CrossRef]
  7. C. M. Wu and C. S. Su, "Nonlinearity in measurements of length by optical interferometry," Meas. Sci. Technol. 7, 62-68 (1996). [CrossRef]
  8. L. Howard, J. Stone, and J. Fu, "Real-time displacement measurements with a Fabry-Perot cavity and a diode laser," Precision Eng. 25, 321-335 (2001). [CrossRef]
  9. Y. Bitou, T. R. Schibli, and K. Minoshima, "Accurate wide-range displacement measurement using tunable diode laser and optical frequency comb generator," Opt. Express 14, 644-654 (2006). [CrossRef] [PubMed]
  10. H. Matsumoto and K. Minoshima, "High-accuracy ultrastable moving stage using a novel self-zooming optical scale," Opt. Commun. 132, 417-420 (1996). [CrossRef]
  11. Y. Zhao, X. H. Cheng, and D. C. Li, "Dual-wavelength parallel interferometer with superhigh resolution," Opt. Lett. 27, 503-505 (2002). [CrossRef]

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