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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 3 — Feb. 4, 2008
  • pp: 1497–1506

Picometer positioning system based on a zooming interferometer using a femtosecond optical comb

Mariko Kajima and Hirokazu Matsumoto  »View Author Affiliations

Optics Express, Vol. 16, Issue 3, pp. 1497-1506 (2008)

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A positioning system based on a new zooming interferometer was developed for calibrating ultrahigh-resolution linear encoders. In the system, the positioning resolution is scaled down from that of the driving stage to that of the controlled stage by a zooming ratio that is determined by the ratio bettween the wavelengths of the optical sources for the zooming interferometer, so that the resolution in the controlled stage becomes very high. A femtosecond optical comb is used to stabilize two external-cavity diode lasers that are used as optical sources for the interferometer. The system realized a resolution of better than 30 pm and a stability of 1 nm.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 26, 2007
Revised Manuscript: January 16, 2008
Manuscript Accepted: January 17, 2008
Published: January 22, 2008

Mariko Kajima and Hirokazu Matsumoto, "Picometer positioning system based on a zooming interferometer using a femtosecond optical comb," Opt. Express 16, 1497-1506 (2008)

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  1. G. Basile, P. Becker, A. Bergamin, G. Cavagnero, A. Franks, K. Jackson, U. Kuetgens, G. Mana, E. W. Palmer, C. J. Robbie, M. Stedman, J. Stümpel, A. Yacoot, and G. Zosi, "Combined optical and X-ray interferometry for high-precision dimensional metrology," Proc. R. Soc. London, Ser. A 456, 701-729 (2000). [CrossRef]
  2. C. M. Wu and R. D. Deslattes, "Analytical modeling of the periodic nonlinearity in heterodyne interferometry," Appl. Opt. 37,6696-6700 (1998). [CrossRef]
  3. N. Bobroff, "Recent advances in displacement measuring interferometry," Meas. Sci. Technol. 4, 907-926 (1993). [CrossRef]
  4. L. Chassagne, S. Topcu, Y. Alayli, and P. Juncar, "Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics," Meas. Sci. Technol. 16, 1771-1777 (2005). [CrossRef]
  5. J. Lawall and E. Kessler, "Michelson interferometry with 10 pm accuracy," Rev. Sci. Instrum. 71, 2669-2676 (2000). [CrossRef]
  6. S. Topcu, L. Chassagne, Y. Alayli, and P. Juncar, "Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques," Opt. Commun. 247, 133-139 (2005). [CrossRef]
  7. C. M. Wu and C. S. Su, "Nonlinearity in measurements of length by optical interferometry," Meas. Sci. Technol. 7, 62-68 (1996). [CrossRef]
  8. L. Howard, J. Stone, and J. Fu, "Real-time displacement measurements with a Fabry-Perot cavity and a diode laser," Precision Eng. 25, 321-335 (2001). [CrossRef]
  9. Y. Bitou, T. R. Schibli, and K. Minoshima, "Accurate wide-range displacement measurement using tunable diode laser and optical frequency comb generator," Opt. Express 14, 644-654 (2006). [CrossRef] [PubMed]
  10. H. Matsumoto and K. Minoshima, "High-accuracy ultrastable moving stage using a novel self-zooming optical scale," Opt. Commun. 132, 417-420 (1996). [CrossRef]
  11. Y. Zhao, X. H. Cheng, and D. C. Li, "Dual-wavelength parallel interferometer with superhigh resolution," Opt. Lett. 27, 503-505 (2002). [CrossRef]

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