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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 3 — Feb. 4, 2008
  • pp: 1517–1522

Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching

Dirk Wortmann, Jens Gottmann, Nelli Brandt, and Herbert Horn-Solle  »View Author Affiliations

Optics Express, Vol. 16, Issue 3, pp. 1517-1522 (2008)

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The fabrication of microchannels and self-assembled nanostructures in the volume of sapphire was performed by femtosecond laser irradiation followed by chemical etching with aqueous solution of HF acid. Depending on the focusing conditions self-organized nanostructures or elliptical microchannels are produced. While the dimensions in two directions are on a micro- respectively nanoscale, feature lengths of up to 1 mm are achieved. This comes out to aspect ratios of more than 1000. This fabrication technique is potentially usable for photonic crystal based integrated optical elements or microfluidic devices for applications in life science, biology or chemistry.

© 2008 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.7130) Ultrafast optics : Ultrafast processes in condensed matter, including semiconductors
(220.4241) Optical design and fabrication : Nanostructure fabrication
(260.7120) Physical optics : Ultrafast phenomena

ToC Category:
Laser Micromachining

Original Manuscript: November 26, 2007
Revised Manuscript: January 15, 2008
Manuscript Accepted: January 16, 2008
Published: January 22, 2008

Virtual Issues
Vol. 3, Iss. 3 Virtual Journal for Biomedical Optics

Dirk Wortmann, Jens Gottmann, Nelli Brandt, and Herbert Horn-Solle, "Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching," Opt. Express 16, 1517-1522 (2008)

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