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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 5 — Mar. 3, 2008
  • pp: 3172–3177

Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon

Zian He, Yigang Li, Yingfeng Li, Yanwu Zhang, Liying Liu, and Lei Xu  »View Author Affiliations

Optics Express, Vol. 16, Issue 5, pp. 3172-3177 (2008)

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Low-loss ion-exchanged sol-gel channel waveguides on silicon substrate were fabricated. Ion-exchangeable aluminosilicate glass film was fabricated by sol-gel technique. Ag+-Li+ thermal ion-exchange was used to achieve single mode channel waveguide. Propagation loss of 0.50 dB/cm and coupling loss of 0.76 dB/facet were measured by cutback method. A Y-branch power splitter was also fabricated. The results demonstrate that ion-exchange technique can be applied to prepare low-loss channel waveguides in thin film structures.

© 2008 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(160.6060) Materials : Solgel
(230.7380) Optical devices : Waveguides, channeled
(240.0310) Optics at surfaces : Thin films
(130.2755) Integrated optics : Glass waveguides

ToC Category:
Integrated Optics

Original Manuscript: December 10, 2007
Revised Manuscript: February 4, 2008
Manuscript Accepted: February 6, 2008
Published: February 21, 2008

Zian He, Yigang Li, Yingfeng Li, Yanwu Zhang, Liying Liu, and Lei Xu, "Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon," Opt. Express 16, 3172-3177 (2008)

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