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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 5 — Mar. 3, 2008
  • pp: 3191–3196

High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process

F. Marsili, D. Bitauld, A. Fiore, A. Gaggero, F. Mattioli, R. Leoni, M. Benkahoul, and F. Lévy  »View Author Affiliations

Optics Express, Vol. 16, Issue 5, pp. 3191-3196 (2008)

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We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400°C. SSPDs were fabricated on high quality NbN films of different thickness (7 to 3nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300nm.

© 2008 Optical Society of America

OCIS Codes
(040.3060) Detectors : Infrared
(040.3780) Detectors : Low light level
(040.5160) Detectors : Photodetectors
(320.7080) Ultrafast optics : Ultrafast devices
(320.7100) Ultrafast optics : Ultrafast measurements
(320.7085) Ultrafast optics : Ultrafast information processing

ToC Category:

Original Manuscript: November 12, 2007
Revised Manuscript: January 24, 2008
Manuscript Accepted: January 30, 2008
Published: February 22, 2008

F. Marsili, D. Bitauld, A. Fiore, A. Gaggero, F. Mattioli, R. Leoni, M. Benkahoul, and F. Lévy, "High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process," Opt. Express 16, 3191-3196 (2008)

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