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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 6 — Mar. 17, 2008
  • pp: 3490–3495

Photo-patternable GeO2-contained organic-inorganic hybrid sol-gel films for photonic applications

Wenxiu Que, C. Y. Jia, M. Sun, Z. Sun, L. L. Wang, and Z. J. Zhang  »View Author Affiliations

Optics Express, Vol. 16, Issue 6, pp. 3490-3495 (2008)

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Photo-patternable GeO2-contained organic-inorganic hybrid films, which can be used for the low cost and mass production of integrated photonic circuits, were synthesized by combining a low-temperature sol-gel process with a spin-coating technique. Optical waveguide properties and photochemical activities of the hybrid sol-gel films were characterized and monitored by a prism coupling technique and a Fourier transform infrared spectroscopy. Advantages for fabrication of ridge structures based on the hybrid films were demonstrated by one-step spin-coating process followed by direct ultraviolet light irradiation. The results indicate that the as-prepared photo-patternable hybrid materials have great applicability for the fabrication of photonic components, and the fabrication process has the advantages of cost-effect and very short processing time over inorganic materials patterning methods.

© 2008 Optical Society of America

OCIS Codes
(160.6060) Materials : Solgel
(260.5130) Physical optics : Photochemistry
(310.6860) Thin films : Thin films, optical properties

ToC Category:

Original Manuscript: December 13, 2007
Revised Manuscript: February 4, 2008
Manuscript Accepted: February 5, 2008
Published: March 3, 2008

Wenxiu Que, C. Y. Jia, M. Sun, Z. Sun, L. L. Wang, and Z. J. Zhang, "Photo-patternable GeO2-contained organic-inorganic hybrid sol-gel films for photonic applications," Opt. Express 16, 3490-3495 (2008)

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