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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 6 — Mar. 17, 2008
  • pp: 3589–3603

Electromagnetic ray tracing model for line structures

C. B. Tan, A. Khoh, and S. H. Yeo  »View Author Affiliations


Optics Express, Vol. 16, Issue 6, pp. 3589-3603 (2008)
http://dx.doi.org/10.1364/OE.16.003589


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Abstract

In this paper, a model for electromagnetic scattering of line structures is established based on high frequency approximation approach - ray tracing. This electromagnetic ray tracing (ERT) model gives the advantage of identifying each physical field that contributes to the total solution of the scattering phenomenon. Besides the geometrical optics field, different diffracted fields associated with the line structures are also discussed and formulated. A step by step addition of each electromagnetic field is given to elucidate the causes of a disturbance in the amplitude profile. The accuracy of the ERT model is also discussed by comparing with the reference finite difference time domain (FDTD) solution, which shows a promising result for a single polysilicon line structure with width of as narrow as 0.4 wavelength.

© 2008 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1960) Diffraction and gratings : Diffraction theory
(080.0080) Geometric optics : Geometric optics
(080.2720) Geometric optics : Mathematical methods (general)

ToC Category:
Diffraction and Gratings

History
Original Manuscript: January 23, 2008
Revised Manuscript: February 25, 2008
Manuscript Accepted: February 26, 2008
Published: March 4, 2008

Citation
C. B. Tan, A. Khoh, and S. H. Yeo, "Electromagnetic ray tracing model for line structures," Opt. Express 16, 3589-3603 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-6-3589


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References

  1. C. B. Tan, S. H. Yeo, H. P. Koh, C. K. Koo, Y. M. Foong, and Y. K. Siew, "Evaluation of alignment marks using ASML ATHENA alignment system in 90 nm BEOL process," Proc. SPIE 5038, 1211-1218 (2003). [CrossRef]
  2. S. H. Yeo, C. B. Tan, and A. Khoh, "Rigorous coupled wave analysis of front-end-of-line wafer alignment marks," J. Vac. Sci. Technol. B 23, 186-195 (2005). [CrossRef]
  3. EM Explorer, http://www.emexplorer.net.
  4. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled wave analysis of binary gratings," J. Opt. Soc. Am. A 12, 1068-1076 (1995). [CrossRef]
  5. M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, "Stable implementation of the rigorous coupled wave analysis for surface-relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Am. A 12, 1077-1086 (1995). [CrossRef]
  6. J. B. Keller, "Geometrical theory of diffraction," J. Opt. Soc. Am. 52, 116-130 (1962). [CrossRef] [PubMed]
  7. R. G. Kouyoumjian and P. H. Pathak, "A uniform geometrical theory of diffraction for an edge in a perfectly conducting surface," Proc. IEEE 62, 1448-1461 (1974). [CrossRef]
  8. A. V. Osipov and A. N. Norris, "The Malyuzhinets theory for scattering from wedge boundaries: a review," Wave Motion 29, 313-340 (1999). [CrossRef]
  9. C. B. Tan, A. Khoh, and S. H. Yeo, "Higher Order Asymptotic Analysis of Impedance Wedge Using Uniform Theory of Diffraction," Electromagnetics 27, 23-39 (2007). [CrossRef]
  10. H. A. Macleod, Thin-Film Optical Filters (Institute of Physics Publishing, Philadelphia, US, 2001). [CrossRef]

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