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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 6 — Mar. 17, 2008
  • pp: 4286–4295

Degrees of polarization and coherence of paired linear polarized laser beam by scattering glass plates measured using optical coherent ellipsometer

Soe-Mie F. Nee, Chih-Jen Yu, Jheng-Syong Wu, Hong-Sheng Huang, Chu-En Lin, and Chien Chou  »View Author Affiliations


Optics Express, Vol. 16, Issue 6, pp. 4286-4295 (2008)
http://dx.doi.org/10.1364/OE.16.004286


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Abstract

An accurate optical coherent ellipsometer (OCE) is proposed and setup in which a two-frequency paired linear polarized laser beam is integrated with a common-path heterodyne interferometer. This OCE is able to precisely measure the optical properties of scattering specimen by measuring ellipsometric parameters (ψ, Δ). In the mean time the degree of polarization P, and degree of coherence χ of incident two-frequency linear polarized laser beam are measured too. In the experiment, both smooth and ground BK7 glass plates were tested in which the optical parameters (ψ, Δ, P, χ) were obtained precisely. Comparing with conventional ellipsometers, OCE can characterize scattering specimen precisely and excludes the scattering effect.

© 2008 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 4, 2008
Revised Manuscript: March 10, 2008
Manuscript Accepted: March 10, 2008
Published: March 13, 2008

Citation
Soe-Mie F. Nee, Chih-Jen Yu, Jheng-Syong Wu, Hong-Sheng Huang, Chu-En Lin, and Chien Chou, "Degrees of polarization and coherence of paired linear polarized laser beam by scattering glass plates measured using optical coherent ellipsometer," Opt. Express 16, 4286-4295 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-6-4286


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References

  1. R. M. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1980).
  2. T. E. Jenkins, "Multiple-angle-of-incidence ellipsometry," J. Phys. D. Appl. Phys. 32, R45-R56 (1999). [CrossRef]
  3. D. E. Aspnes, "Expanding horizons: new developments in ellipsometry and polarimetry," Thin Solid Films 455-456, 3-13 (2004). [CrossRef]
  4. K. Riedling, Ellipsometry for Industrial Applications (Springer-Verlag, New York, 1988). [CrossRef]
  5. R. Greef, "An automatic ellipsometer for use in electrochemical investigations," Rev. Sci. Instrum. 41, 532-538 (1970). [CrossRef]
  6. C. V. Kent, "A photoelectric method for the determination of the parameters of elliptically polarized light," J. Opt. Soc. Am. 27, 117-119 (1937). [CrossRef]
  7. D. E. Aspnes, "Optimizing precision of rotating-analyzer ellipsometers," J. Opt. Soc. Am. 64, 639-646 (1974). [CrossRef]
  8. S. N. Jasperson and S. E. Schnatterly, "An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique," Rev. Sci. Instrum. 40, 761 (1969). [CrossRef]
  9. S. N. Jasperson, D. K. Burge, and R. C. O’Handley, "A modulated ellipsometer for studying thin film optical properties and surface dynamics," Surf. Sci. 37, 548-558 (1973). [CrossRef]
  10. C. Chou, H. K. Teng, C. J. Yu, and H. S. Huang, "Polarization modulation imaging ellipsometry for thin film thickness measurement," Opt. Commun. 273, 74-83 (2007). [CrossRef]
  11. M. W. Wang, F. H. Tsai, and Y. F. Chao, "In situ calibration technique for photoelastic modulator in ellipsometry," Thin Solid Films 455-456, 78-83 (2004). [CrossRef]
  12. S.-M. F. Nee and T. W. Nee, "Principal Mueller matrix of reflection and scattering measured for a one-dimensional rough surface," Opt. Eng. 41, 994-1001 (2002). [CrossRef]
  13. S. -M. F. Nee, "Error analysis of null ellipsometry with depolarization," Appl. Opt. 38, 5388-5398 (1999). [CrossRef]
  14. S. -M. F. Nee, "Depolarization and principal Mueller matrix measured by null ellipsometry," Appl. Opt. 40, 4933-4939 (2001). [CrossRef]
  15. C. H. Lin, C. Chou, K. S. Chang, "Real time interferometric ellipsometry with optical heterodyne and phase lock in technique," Appl. Opt. 29,5159-5162 (1990). [CrossRef] [PubMed]
  16. C. Chou, H. K. Teng, C. C. Tsai, and L. P. Yu, "Balanced detector interferometric ellipsometer," J. Opt. Soc. Am. A 23, 2871-2879 (2006). [CrossRef]
  17. H. F. Chang, C. Chou, H. K. Teng, H. T. Wu, and H. F. Yau, "The use of polarization and amplitude-sensitive optical heterodyne interferometry for linear birefringence parameters measurement," Opt. Commun. 260, 420-426 (2006). [CrossRef]
  18. D. C. Su, M. H. Chiu, and C. D. Chen, "Simple two-frequency laser," Prec. Eng. 18, 161-163 (1996). [CrossRef]

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