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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 6 — Mar. 17, 2008
  • pp: 4286–4295

Degrees of polarization and coherence of paired linear polarized laser beam by scattering glass plates measured using optical coherent ellipsometer

Soe-Mie F. Nee, Chih-Jen Yu, Jheng-Syong Wu, Hong-Sheng Huang, Chu-En Lin, and Chien Chou  »View Author Affiliations

Optics Express, Vol. 16, Issue 6, pp. 4286-4295 (2008)

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An accurate optical coherent ellipsometer (OCE) is proposed and setup in which a two-frequency paired linear polarized laser beam is integrated with a common-path heterodyne interferometer. This OCE is able to precisely measure the optical properties of scattering specimen by measuring ellipsometric parameters (ψ, Δ). In the mean time the degree of polarization P, and degree of coherence χ of incident two-frequency linear polarized laser beam are measured too. In the experiment, both smooth and ground BK7 glass plates were tested in which the optical parameters (ψ, Δ, P, χ) were obtained precisely. Comparing with conventional ellipsometers, OCE can characterize scattering specimen precisely and excludes the scattering effect.

© 2008 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 4, 2008
Revised Manuscript: March 10, 2008
Manuscript Accepted: March 10, 2008
Published: March 13, 2008

Soe-Mie F. Nee, Chih-Jen Yu, Jheng-Syong Wu, Hong-Sheng Huang, Chu-En Lin, and Chien Chou, "Degrees of polarization and coherence of paired linear polarized laser beam by scattering glass plates measured using optical coherent ellipsometer," Opt. Express 16, 4286-4295 (2008)

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