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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 6 — Mar. 17, 2008
  • pp: 4309–4315

Silicon microring resonators with 1.5-µm radius

Qianfan Xu, David Fattal, and Raymond G. Beausoleil  »View Author Affiliations


Optics Express, Vol. 16, Issue 6, pp. 4309-4315 (2008)
http://dx.doi.org/10.1364/OE.16.004309


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Abstract

We demonstrate a junction between a silicon strip waveguide and an ultra-compact silicon microring resonator that minimizes spurious light scattering and increases the critical dimensions of the geometry. We show cascaded silicon microring resonators with radii around 1.5 µm and effective mode volumes around 1.0 µm3 that are critically coupled to a waveguide with coupled Q’s up to 9,000. The radius of 1.5 µm is smaller than the operational wavelength, and is close to the theoretical size limit of the silicon microring ring resonator for the same Q. The device is fabricated with a widely-available SEM-based lithography system using a stitch-free design based on a U-shaped waveguide.

© 2008 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

History
Original Manuscript: January 3, 2008
Revised Manuscript: March 8, 2008
Manuscript Accepted: March 12, 2008
Published: March 14, 2008

Citation
Qianfan Xu, David Fattal, and Raymond G. Beausoleil, "Silicon microring resonators with 1.5-μm radius," Opt. Express 16, 4309-4315 (2008)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-16-6-4309


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References

  1. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
  2. A. W. Fang, R. Jones, H. Park, O. Cohen, O. Raday, M. J. Paniccia, and J. E. Bowers, "Integrated AlGaInAs-silicon evanescent race track laser and photodetector," Opt. Express 15, 2315-2322 (2007). [CrossRef] [PubMed]
  3. W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, R. Baets, and E. Pluk, "A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires," Opt. Express 15, 1567-1578 (2007). [CrossRef] [PubMed]
  4. S. Xiao, M. H. Khan, H. Shen, and M. Qi, "A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion," Opt. Express 15, 14765-14771 (2007). [CrossRef] [PubMed]
  5. M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, "Tunable silicon microring resonator with wide free spectral range," Appl. Phys. Lett. 89, 071110 (2006). [CrossRef]
  6. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
  7. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
  8. Y. Kuo, Y. Lee, Y. Ge, S. Ren, J. E. Roth, T. I. Kamins, D. A. B. Miller, and J. S. Harris, "Strong quantum-confined Stark effect in germanium quantum-well structures on silicon," Nature 437, 1334-1336 (2005). [CrossRef] [PubMed]
  9. O. I. Dosunmu, D. D. Cannon, M. K. Emsley, L. C. Kimerling, and M. S. Unlu, "High-speed resonant cavity enhanced Ge photodetectors on reflecting Si substrates for 1550-nm operation," IEEE Photon. Technol. Lett. 17, 175-177 (2005). [CrossRef]
  10. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, "12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators," Opt. Express 15, 430-436 (2007). [CrossRef] [PubMed]
  11. Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431-9435 (2006). [CrossRef] [PubMed]
  12. P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, "Polymer Micro-Ring Filters and Modulators," J. Lightwave Technol. 20, 1968 (2002). [CrossRef]
  13. K. K. Lee, D. R. Lim, H.-C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617-1619 (2000). [CrossRef]
  14. Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004). [CrossRef] [PubMed]
  15. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, and W. Henschel, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2006). [CrossRef]
  16. F. Xia, L. Sekaric, and Y. A. Vlasov, "Mode conversion losses in silicon-on-insulator photonic wire based racetrack resonators," Opt. Express 14, 3872-3886 (2006) http://www.opticsinfobase.org/abstract.cfm?URI=oe-14-9-3872. [CrossRef] [PubMed]

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