OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 7 — Mar. 31, 2008
  • pp: 5136–5140

Integration of epitaxially-grown InGaAs/GaAs quantum dot lasers with hydrogenated amorphous silicon waveguides on silicon

Jun Yang and Pallab Bhattacharya  »View Author Affiliations

Optics Express, Vol. 16, Issue 7, pp. 5136-5140 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (541 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The monolithic integration of epitaxially-grown InGaAs/GaAs self-organized quantum dot lasers with hydrogenated amorphous silicon (a:Si-H) waveguides on silicon substrates is demonstrated. Hydrogenated amorphous silicon waveguides, formed by plasma-enhanced-chemical-vapor deposition (PECVD), exhibit a propagation loss of ~10 dB/cm at a wavelength of 1.05 µm. The laser-waveguide coupling, with coupling coefficient of 22%, is achieved through a 3.2 µm-width groove etched by focused-ion-beam (FIB) milling which creates high-quality etched GaAs facets.

© 2008 Optical Society of America

OCIS Codes
(140.5960) Lasers and laser optics : Semiconductor lasers
(230.7370) Optical devices : Waveguides
(250.3140) Optoelectronics : Integrated optoelectronic circuits
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:
Lasers and Laser Pointers

Original Manuscript: December 18, 2007
Revised Manuscript: March 8, 2008
Manuscript Accepted: March 20, 2008
Published: March 28, 2008

Jun Yang and Pallab Bhattacharya, "Integration of epitaxially-grown InGaAs/GaAs quantum dot lasers with hydrogenated amorphous silicon waveguides on silicon," Opt. Express 16, 5136-5140 (2008)

Sort:  Journal  |  Reset  


  1. R. Soref, "The past, present, and future of silicon photonics," IEEE J. Sel. Top. Quantum Electron. 12, 1678-1687 (2006). [CrossRef]
  2. B. Jalali and S. Fathpour, "Silicon photonics," J. Lightwave Technol. 24, 4600-4615 (2006). [CrossRef]
  3. M. Lipson, "Guiding, modulating, and emitting light on silicon ― challenges and opportunities," J. Lightwave Technol. 23, 4222-4238 (2005). [CrossRef]
  4. S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouk, M. Heitzmann, N. Bouzaida, and L. Mollard, "Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors," Opt. Lett. 28, 1150-1152 (2003). [CrossRef] [PubMed]
  5. Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004). [CrossRef] [PubMed]
  6. O. Qasaimeh, P. Bhattacharya, and E. T. Croke, "SiGe-Si quantum-well electroabsorption modulators," IEEE Photon. Technol. Lett. 10, 807-809 (1998). [CrossRef]
  7. Y. H. Kuo, Y. K. Lee, Y. S. Ge, S. Ren, J. E. Roth, T. I. Kamins, D. A. B. Miller, and J. S. Harris, "Strong quantum-confined Stark effect in germanium quantum-well structures on silicon," Nature 437, 1334-1336 (2005). [CrossRef] [PubMed]
  8. R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987). [CrossRef]
  9. L. Liao, D. Samara-Rubio, M. Morse, A. S. Liu, D. Hodge, D. Rubin, U. D. Keil, and T. Franck, "High speed silicon Mach-Zehnder modulator," Opt. Express 13, 3129-3135 (2005). [CrossRef] [PubMed]
  10. Q. F. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometer-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
  11. G. Cocorullo, F. G. Della Corte, R. De Rosa, I. Rendina, A. Rubino, and E. Terzini, "Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics," IEEE J. Sel. Top. Quantum Electron. 4, 997-1002 (1998). [CrossRef]
  12. J. Yang, P. Bhattacharya, and Z. Mi, "High-performance In0.5Ga0.5As/GaAs quantum-dot lasers on silicon with multiple-layer quantum-dot dislocation filters," IEEE Trans. Electron Dev. 54, 2849-2855 (2007). [CrossRef]
  13. J. Yang, Z. Mi, and P. Bhattacharya, "Grooved-coupled InGaAs/GaAs quantum dot laser/waveguide on silicon," J. Lightwave Technol. 25, 1826-1831 (2007). [CrossRef]
  14. A. Harke, M. Krause, and J. Mueller, "Low-loss singlemode amorphous silicon waveguides," Electron. Lett. 41, 1377-1379 (2005). [CrossRef]
  15. Z. Mi, P. Bhattacharya, and J. Yang, "Growth and characteristics of ultralow threshold 1.45 µm metamorphic InAs tunnel injection quantum dot lasers on GaAs," Appl. Phys. Lett. 89, 153109 (2006). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1. Fig. 2. Fig. 3.
Fig. 4.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited