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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 16, Iss. 9 — Apr. 28, 2008
  • pp: 6119–6124

Multilayer coatings monitoring using admittance diagram

Cheng-Chung Lee and Yu-Jen Chen  »View Author Affiliations

Optics Express, Vol. 16, Issue 9, pp. 6119-6124 (2008)

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A method based on admittance diagram called Admittance Real-time Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring method is highly sensitive and capable to compensate for thickness errors. The sensitivities of ARM were compared with that of the conventional method by using runsheet diagram. The in situ error compensation of ARM showed a great improvement in the optical performance when utilized in an anti-reflection coating process.

© 2008 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

Original Manuscript: January 22, 2008
Revised Manuscript: April 14, 2008
Manuscript Accepted: April 14, 2008
Published: April 16, 2008

Cheng-Chung Lee and Yu-Jen Chen, "Multilayer coatings monitoring using admittance diagram," Opt. Express 16, 6119-6124 (2008)

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