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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 1 — Jan. 5, 2009
  • pp: 208–217

Non-thermal desorption/ablation of molecular solids induced by ultra-short soft x-ray pulses

J. Chalupský, L. Juha, V. Hájková, J. Cihelka, L. Vyšĺn, J. Gautier, J. Hajdu, S. P. Hau-Riege, M. Jurek, J. Krzywinski, R. A. London, E. Papalazarou, J. B. Pelka, G. Rey, S. Sebban, R. Sobierajski, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, C. Valentin, H. Wabnitz, and P. Zeitoun  »View Author Affiliations


Optics Express, Vol. 17, Issue 1, pp. 208-217 (2009)
http://dx.doi.org/10.1364/OE.17.000208


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Abstract

We report the first observation of single-shot soft x-ray laser induced desorption occurring below the ablation threshold in a thin layer of poly (methyl methacrylate) - PMMA. Irradiated by the focused beam from the Free-electron LASer in Hamburg (FLASH) at 21.7nm, the samples have been investigated by atomic-force microscope (AFM) enabling the visualization of mild surface modifications caused by the desorption. A model describing non-thermal desorption and ablation has been developed and used to analyze single-shot imprints in PMMA. An intermediate regime of materials removal has been found, confirming model predictions. We also report below-threshold multiple-shot desorption of PMMA induced by high-order harmonics (HOH) at 32nm. Short-time exposure imprints provide sufficient information about transverse beam profile in HOH’s tight focus whereas long-time exposed PMMA exhibits radiation-initiated surface hardening making the beam profile measurement infeasible.

© 2009 Optical Society of America

OCIS Codes
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(140.3330) Lasers and laser optics : Laser damage
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: November 4, 2008
Revised Manuscript: December 5, 2008
Manuscript Accepted: December 11, 2008
Published: December 24, 2008

Citation
J. Chalupský, L. Juha, V. Hájková, J. Cihelka, L. Vyšín, J. Gautier, J. Hajdu, S. P. Hau-Riege, M. Jurek, J. Krzywinski, R. A. London, E. Papalazarou, J. B. Pelka, G. Rey, S. Sebban, R. Sobierajski, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, C. Valentin, H. Wabnitz, and P. Zeitoun, "Non-thermal desorption/ablation of molecular solids induced by ultra-short soft x-ray pulses," Opt. Express 17, 208-217 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-1-208


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References

  1. V. Ayvazyan et al., "A new powerful source for coherent VUV radiation: Demonstration of exponential growth and saturation at the TTF free-electron laser," Eur. Phys. J. D 20, 149-156 (2002).
  2. V. Ayvazyan et al., "Generation of GW radiation pulses from a VUV free-electron laser operating in the femtosecond regime," Phys. Rev. Lett. 88, 104802 (2002). [CrossRef] [PubMed]
  3. V.  Ayvazyan et al., "First operation of a free-electron laser generating GW power radiation at 32 nm wavelength," Eur. J. Phys. D37, 297-303 (2006).
  4. B.  Rus, T.  Mocek, A. R.  Präg, M.  Kozlová, G.  Jamelot, A.  Carillon, D.  Ros, D.  Joyeux, and D.  Phalippou, "Multi-millijoule, highly coherent X-ray laser at 21 nm operating in deep saturation through double-pass amplification," Phys. Rev. A 66, 063806-12 (2002).
  5. B.  Rus, A.  Carillon, P.  Dhez, P.  Jaeglé, G.  Jamelot, A.  Klisnick, M.  Nantel, and P.  Zeitoun, "An efficient, high-brightness soft X-ray laser at 21.2 nm," Phys. Rev. A 55, 3858-3873 (1997).
  6. P. Balcou, R. Haroutunian, S. Sebban, G. Grillon, A. Rousse, G. Mullot, J. P. Chambaret, G. Rey, A. Antonetti, D. Hulin, L. Roos, D. Descamps, M. B. Gaarde, A. L'Huillier, E. Constant, E. Mevel, D. von der Linde, A. Orisch, A. Tarasevitch, U. Teubner, D. Klopfel, and W. Theobald, "High-order-harmonic generation: towards laser-induced phase-matching control and relativistic effects," Appl. Phys. 74, 509-515 (2002). [CrossRef]
  7. S. Kazamias, D. Douillet, F. Weihe, C. Valentin, A. Rousse, S. Sebban, G. Grillon, F. Auge´, D. Hulin, and Ph. Balcou, "Global optimization of high harmonic generation," Phys. Rev. Lett. 90, 193901 (2003). [CrossRef] [PubMed]
  8. J. J. Rocca, V. N. Shlyaptsev, F. G. Tomasel, O. D. Cortazar, D. Hartshorn, and J. L. A. Chilla, "Demonstration of a discharge pumped table-top soft-X-ray laser," Phys. Rev. Lett. 73, 2192-2195 (1994). [CrossRef] [PubMed]
  9. S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, "Demonstration of a desk-top size high repetition rate soft x-ray laser," Opt. Express 13,4050-4055 (2005). [CrossRef] [PubMed]
  10. P. E. Dyer, "Excimer laser polymer ablation: twenty years on," Appl. Phys. A77, 167-173 (2003), and references cited therein.
  11. L. V. Zhigilei and B. J. Garrison, "Molecular dynamics simulation study of the fluence dependence of particle yield and plume composition in laser desorption and ablation of organic solids," Appl. Phys. Lett. 74,1341-1343 (1999). [CrossRef]
  12. J. Krzywinski, R Sobierajski, M. Jurek, R. Nietubyc, J. B. Pelka, L. Juha, M. Bittner, V. Létal, V. Vorlí?ek, A. Andrejczuk, J. Feldhaus, B. Keitel, E. L. Saldin, E. A. Schneidmiller, R. Treusch, and M. V. Yurkov, "Conductors, semiconductors, and insulators irradiated with short-wavelength free-electron laser," J. Appl. Phys. 101, 043107 (2007). [CrossRef]
  13. L.  Juha, J.  Krása, A.  Präg, A.  Cejnarová, D.  Chvostová, K.  Rohlena, K.  Jungwirth, J.  Kravárik, P.  Kubeš, Yu. L.  Bakshaev, A. S.  Chernenko, V. D.  Korolev, V. I.  Tumanov, M. I.  Ivanov, A.  Bernardinello, J.  Ullschmied, and F. P.  Boody, "Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas," Surf. Rev. Lett. 9, 347-352 (2002). [CrossRef]
  14. L.  Juha, M.  Bittner, D.  Chvostová, J.  Krása, Z.  Otcenasek, A. R.  Präg, J.  Ullschmied, Z.  Pientka, J.  Krzywinski, J. B.  Pelka, A.  Wawro, M. E.  Grisham, G.  Vaschenko, C. S.  Menoni, and J. J.  Rocca, "Ablation of organic polymers by 46.9-nm laser radiation," Appl. Phys. Lett. 86, 034109 (2005). [CrossRef]
  15. L.  Juha, M.  Bittner, D.  Chvostová, J.  Krása, M.  Kozlová, M.  Pfeifer, J.  Polan, A. R.  Präg, B.  Rus, M. Stupka, J.  Feldhaus, V.  Létal, Z.  Otcenasek, J.  Krzywinski, R.  Nietubyc, J. B.  Pelka, A.  Andrejczuk, R.  Sobierajski, L.  Ryc, F. P.  Boody, H.  Fiedorowicz, A.  Bartnik, J.  Mikolajczyk, R.  Rakowski, P.  Kubat, L.  Pína, M.  Horvath, M. E.  Grisham, G. O.  Vaschenko, C. S.  Menoni, and J. J.  Rocca, "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," J. Microlith. Microfab. Microsyst. 4, 033007 (2005), and references cited therein. [CrossRef]
  16. J. Chalupsky, L. Juha, J. Kuba, J. Cihelka, V. Hájková, M. Bergh, R. M. Bionta, C. Caleman, H. Chapman, J. Hajdu, S. P. Hau-Riege, M. Jurek, S. Koptyaev, J. Krása, A. Krenz-Tronnier, J. Krzywinski, R. A. London, J. Meyer-ter-Vehn, R. Nietubyc, J. B. Pelka, R. Sobierajski, K. Sokolowski-Tinten, N. Stojanovic, K. Tiedtke, S. Toleikis, T. Tschentscher, A. Velyhan, H. Wabnitz, and U. Zastrau, "Ablation of organic molecular solids by focused soft X-ray free-electron laser radiation," in Proc. 10th International Conference on X-ray Lasers - ICXRL 2006, P. V. Nickles, K. A. Janulewicz, ed. (Springer-Verlag, 2007), pp. 503-510.
  17. J. Chalupský, L. Juha, J. Kuba, V. Hájková, J. Cihelka, P. Homer, M. Kozlová, T. Mocek, J. Polan, B. Rus, J. Krzywinsky, R. Sobierajski, H. Wabnitz, J. Feldhaus, and K. Tiedtke, "Utilizing ablation of solids to characterize a focused soft x-ray laser beam," Proc. SPIE 6586, 65860S-1 (2007). [CrossRef]
  18. S. P. Hau-Riege, R. A. London, R. M. Bionta, M. A. McKernan, S. L. Baker, J. Krzywinski, R. Sobierajski, R. Nietubyc, J. B. Pelka, M. Jurek, L. Juha, J. Chalupsky, J. Cihelka, V. Hajkova, A. Velyhan, J. Krasa, J. Kuba, K. Tiedtke, S. Toleikis, T. Tschentscher, H. Wabnitz, M. Bergh, C. Caleman, K. Sokolowski-Tinten, N. Stojanovic, and U. Zastrau, "Damage threshold of inorganic solids under free-electron-laser irradiation at 32.5 nm wavelength," Appl. Phys. Lett. 90, 173128 (2007). [CrossRef]
  19. N. Stojanovic, D. von der Linde, K. Sokolowski-Tinten, U. Zastrau, F. Perner, E. Foerster, R. Sobierajski, R. Nietubyc, M. Jurek, D. Klinger, J. Pelka, J. Krzywinski, L. Juha, J. Cihelka, A. Velyhan, S. Koptyaev, V. Hajkova, J. Chalupsky, J. Kuba, T. Tschentscher, S. Toleikis, S. Duesterer, and H. Redlin, "Ablation of solids using a femtosecond extreme ultraviolet free electron laser," Appl. Phys. Lett. 89, 241909 (2006). [CrossRef]
  20. R. F. Haglund, "Microscopic and mesoscopic aspects of laser-induced desorption and ablation," Appl. Surf. Sci. 96-98, 1-13 (1996). [CrossRef]
  21. J. M.  Liu, "Simple technique for measurements of pulsed Gaussian-beam spot sizes," Opt. Lett. 7, 196-198 (1982). [CrossRef] [PubMed]
  22. J.  Chalupský, L.  Juha, J.  Kuba, J.  Cihelka, V.  Hájková, S.  Koptyaev, J.  Krása, A.  Velyhan, M.  Bergh, C.  Caleman, J.  Hajdu, R. M.  Bionta, H.  Chapman, S. P.  Hau-Riege, R. A.  London, M.  Jurek, J.  Krzywinski, R.  Nietubyc, J. B.  Pelka, R.  Sobierajski, J.  Meyer-ter-Vehn, A.  Tronnier, K.  Sokolowski-Tinten, N.  Stojanovic, K.  Tiedtke, S.  Toleikis, T.  Tschentscher, H.  Wabnitz, and U.  Zastrau, "Characteristics of focused soft X-ray free-electron laser beam determined by ablation of organic molecular solids," Opt. Express 15, 6036 (2007). [CrossRef] [PubMed]
  23. M. Richter, A. Gottwald, U. Kroth, A.A. Sorokin, S. V. Bobashev, L. A. Shmaenok, J. Feldhaus, C. Gerth, B. Steeg, K. Tiedtke, and R. Treusch, "Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser," Appl. Phys. Lett 83, 2970-2972 (2003). [CrossRef]
  24. S. Düsterer, P. Radcliffe, G. Geloni, U. Jastrow, M. Kuhlmann, E. Plönjes, K. Tiedtke, R. Treusch, J. Feldhaus, P. Nicolosi, L. Poletto, P. Yeates, H. Luna, J. T. Costello, P. Orr, D. Cubaynes, and M. Meyer, "Spectroscopic characterization of vacuum ultraviolet free electron laser pulses," Opt. Lett. 31, 1750-1752 (2006). [CrossRef] [PubMed]
  25. L. V. Zhigilei, Y. G. Yingling, T. E. Itina, T. A. Schoolcraft, and B. J. Garrison, "Molecular dynamics simulations of matrix-assisted laser desorption - connections to experiment," Int. J. Mass Spectr. 226, 85-106 (2003). [CrossRef]
  26. I. Horcas, R. Fernandez, J. M. Gomez-Rodriguez, J. Colchero, J. Gomez-Herrero, and A. M. Baro, "WSXM: A software for scanning probe microscopy and a tool for nanotechnology," Rev. Sci. Instrum. 78, 013705 (2007). [CrossRef] [PubMed]
  27. D. A. G. Deacon, "Optical coating damage and performance requirements in free electron lasers," Nucl. Instrum. Meth. Phys. Res. A 250, 283-288 (1986).
  28. E. M. Lehockey, I. Reid, and I. Hill, "The radiation chemistry of poly(methyl methacrylate) polymer resists," J. Vac. Sci. Technol. A 6, 828-832 (1997).
  29. T. Mocek, B. Rus, M. Kozlová, M. Stupka, A. R. Präg, J. Polan, M. Bittner, R. Sobierajski, and L. Juha, "Focusing a multimillijoule soft x-ray laser at 21 nm," Appl. Phys. Lett. 89, 051501 (2006). [CrossRef]
  30. M. De Grazia, H. Merdji, B. Carré, J. Gaudin, G. Geoffroy, S. Guizard, N. Fedorov, A. Belsky, P. Martin, M. Kirm, V. Babin, E. Feldbach, S. Vielhauer, V. Nagirnyi, A. Vassil'ev, F. Krejci, J. Kuba, J. Chalupsky, J. Cihelka, V. Hajkova, M. Ledinský, and L. Juha, "Applications of intense ultra-short XUV pulses to solid state physics: time-resolved luminescence spectroscopy and radiation damage studies, " Proc. SPIE 6586, 65860I-1 (2007). [CrossRef]
  31. F. Barkusky, C. Peth, A. Bayer, and K. Mann, "Direct photo-etching of poly(methyl methacrylate) using focused extreme ultraviolet radiation from a table-top laser-induced plasma source," J. Appl. Phys. 101, 124908 (2008). [CrossRef]
  32. C. Peth, F. Barkusky, and K. Mann, "Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source," J. Phys. D41, 105202 (2008).

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