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Ultra-low capacitance and high speed germanium photodetectors on silicon
Long Chen and Michal Lipson »View Author Affiliations
School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853 lc286@cornell.edu
Optics Express, Vol. 17, Issue 10, pp. 7901-7906 (2009)
http://dx.doi.org/10.1364/OE.17.007901
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Abstract
We demonstrate waveguide integrated germanium detectors with capacitance as small as 2.4 fF and directly recorded impulse response as fast as 8.8 ps. Based on such detectors and cascaded silicon microring resonators we also demonstrate a highly scalable wavelength division demultiplexing system that can potentially provide tera-bit/s (Tbps) bandwidth over a small area.
© 2009 Optical Society of America
OCIS Codes
(040.5160) Detectors : Photodetectors
(200.4650) Optics in computing : Optical interconnects
(250.5300) Optoelectronics : Photonic integrated circuits
ToC Category:
Detectors
History
Original Manuscript: February 27, 2009
Revised Manuscript: April 26, 2009
Manuscript Accepted: April 27, 2009
Published: April 28, 2009
Citation
Long Chen and Michal Lipson, "Ultra-low capacitance and high speed germanium
photodetectors on silicon," Opt. Express 17, 7901-7906 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-10-7901
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References
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- N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, "Optical 4x4 hitless silicon router for optical Networks-on-Chip (NoC)," Opt. Express 16, 19395-19395 (2008). [CrossRef]
- L. Chen, P. Dong, and M. Lipson, "High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding," Opt. Express 16, 11513-11518 (2008). [CrossRef] [PubMed]
- S. Y. Chou, W. Khalil, T. Y. Hsiang, and S. Alexandrou, "Ultrafast nanoscale metal-semiconductor-metal photodetectors on bulk and low-temperature grown GaAs," Appl. Phys. Lett. 61, 819-821 (1992). [CrossRef]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics,". IEEE Photon. Technol. Lett. 12, 323-325 (2000). [CrossRef]
- H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. Sysak, M. Paniccia, and J. Bowers, "A hybrid AlGaInAs-silicon evanescent waveguide photodetector," Opt. Express 15, 6044-6052 (2007). [CrossRef] [PubMed]
- A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- W.C. Dash and R. Newman, "Intrinsic optical absorption in single crystal germanium and silicon at 77oK and 300oK," Phys. Rev. 99, 1151-1155 (1955). [CrossRef]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
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- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
- Q. Tong, L. Huang, and U. Gosele, "Transfer of semiconductor and oxide films by wafer bonding and layer cutting," J. Electron. Maters 29, 928-932 (2000). [CrossRef]
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nat. Photonics 2, 242 - 246 (2008) [CrossRef]
- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Express 15, 17106-17113 (2007). [CrossRef] [PubMed]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- S. Y. Chou, W. Khalil, T. Y. Hsiang, and S. Alexandrou, "Ultrafast nanoscale metal-semiconductor-metal photodetectors on bulk and low-temperature grown GaAs," Appl. Phys. Lett. 61, 819-821 (1992). [CrossRef]
- Q. Tong, L. Huang, and U. Gosele, "Transfer of semiconductor and oxide films by wafer bonding and layer cutting," J. Electron. Maters 29, 928-932 (2000). [CrossRef]
- H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. Sysak, M. Paniccia, and J. Bowers, "A hybrid AlGaInAs-silicon evanescent waveguide photodetector," Opt. Express 15, 6044-6052 (2007). [CrossRef] [PubMed]
- A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- S. Y. Chou, W. Khalil, T. Y. Hsiang, and S. Alexandrou, "Ultrafast nanoscale metal-semiconductor-metal photodetectors on bulk and low-temperature grown GaAs," Appl. Phys. Lett. 61, 819-821 (1992). [CrossRef]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics,". IEEE Photon. Technol. Lett. 12, 323-325 (2000). [CrossRef]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, "Optical 4x4 hitless silicon router for optical Networks-on-Chip (NoC)," Opt. Express 16, 19395-19395 (2008). [CrossRef]
- L. Chen, P. Dong, and M. Lipson, "High performance germanium photodetectors integrated on submicron silicon waveguides by low temperature wafer bonding," Opt. Express 16, 11513-11518 (2008). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9430-9435 (2006). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
- B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics,". IEEE Photon. Technol. Lett. 12, 323-325 (2000). [CrossRef]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000). [CrossRef]
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
- W.C. Dash and R. Newman, "Intrinsic optical absorption in single crystal germanium and silicon at 77oK and 300oK," Phys. Rev. 99, 1151-1155 (1955). [CrossRef]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics,". IEEE Photon. Technol. Lett. 12, 323-325 (2000). [CrossRef]
- H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. Sysak, M. Paniccia, and J. Bowers, "A hybrid AlGaInAs-silicon evanescent waveguide photodetector," Opt. Express 15, 6044-6052 (2007). [CrossRef] [PubMed]
- A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. Sysak, M. Paniccia, and J. Bowers, "A hybrid AlGaInAs-silicon evanescent waveguide photodetector," Opt. Express 15, 6044-6052 (2007). [CrossRef] [PubMed]
- A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9430-9435 (2006). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9430-9435 (2006). [CrossRef]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- Q. Tong, L. Huang, and U. Gosele, "Transfer of semiconductor and oxide films by wafer bonding and layer cutting," J. Electron. Maters 29, 928-932 (2000). [CrossRef]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nat. Photonics 2, 242 - 246 (2008) [CrossRef]
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nat. Photonics 2, 242 - 246 (2008) [CrossRef]
- Q. Xu, D. Fattal, and R. G. Beausoleil, "Silicon microring resonators with 1.5-μm radius," Opt. Express 16, 4309-4315 (2008). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9430-9435 (2006). [CrossRef]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
Appl. Phys. Lett.
- S. Y. Chou, W. Khalil, T. Y. Hsiang, and S. Alexandrou, "Ultrafast nanoscale metal-semiconductor-metal photodetectors on bulk and low-temperature grown GaAs," Appl. Phys. Lett. 61, 819-821 (1992). [CrossRef]
IEEE J. Sel. Top. Quantum Electron.
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
IEEE Photon. Technol. Lett.
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics,". IEEE Photon. Technol. Lett. 12, 323-325 (2000). [CrossRef]
J. Electron. Maters.
- Q. Tong, L. Huang, and U. Gosele, "Transfer of semiconductor and oxide films by wafer bonding and layer cutting," J. Electron. Maters 29, 928-932 (2000). [CrossRef]
Nat. Photonics
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nat. Photonics 2, 242 - 246 (2008) [CrossRef]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
Nature
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
Opt. Eng.
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
Opt. Express
- N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, "Optical 4x4 hitless silicon router for optical Networks-on-Chip (NoC)," Opt. Express 16, 19395-19395 (2008). [CrossRef]
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- W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Express 15, 17106-17113 (2007). [CrossRef] [PubMed]
- A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203-9210 (2006). [CrossRef] [PubMed]
- D. Ahn, C. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, "High performance, waveguide integrated Ge photodetectors," Opt. Express 15, 3916-3921 (2007). [CrossRef] [PubMed]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- T. Yin, R. Cohen, M. Morse1, G. Sarid, Y. Chetrit, D. Rubin, and M. J. Paniccia, "31GHz Ge n-i-p waveguide photodetectors on Silicon-on-Insulator substrate," Opt. Express 15, 13965-13971 (2007). [CrossRef] [PubMed]
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- Q. Xu, D. Fattal, and R. G. Beausoleil, "Silicon microring resonators with 1.5-μm radius," Opt. Express 16, 4309-4315 (2008). [CrossRef] [PubMed]
- L. Vivien, J. Osmond, J. Fédéli, D. Marris-Morini, P. Crozat, J. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 17, 6252-6257 (2009). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9430-9435 (2006). [CrossRef]
Phys. Rev.
- W.C. Dash and R. Newman, "Intrinsic optical absorption in single crystal germanium and silicon at 77oK and 300oK," Phys. Rev. 99, 1151-1155 (1955). [CrossRef]
Proc. IEEE
- D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000). [CrossRef]
Other
- The drift velocity of electrons in germanium saturates at ~6E4 m/s with electrical field of 5E5 V/m, and holes reach 90% of its saturated velocity of the same value at electrical field of 1E6 V/m. See Levinshtein, M. & Simin, G.S. Getting to Know Semiconductors (World Scientific, 1992).
- S. Assefa, F. Xia, S.W. Bedell, Y. Zhang, T. Topuria, P. M. Rice, and Y. A. Vlasov, "CMOS-Integrated 40 GHz germanium waveguide photodetector for on-chip optical interconnects," Optical Fiber Communication Conference (OFC), OMR4 (2009).
2009, Vivien, Opt. Express
- Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nat. Photonics 2, 242 - 246 (2008) [CrossRef]
- L. Tang, S. E. Kocabas, S. Latif, A. K. Okyay, D. Ly-Gagnon, K. C. Saraswat, and D. A. B. Miller, "Nanometre-scale germanium photodetector enhanced by a near-infrared dipole antenna," Nat. Photonics 2, 226-229 (2008). [CrossRef]
- L. Vivien, M. Rouvière, J. Fédéli, D. Marris-Morini, J. Damlencourt, J. Mangeney, P. Crozat, L. Melhaoui, E. Cassan, X. Roux, D. Pascal, and S. Laval, "High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide," Opt. Express 15, 9843-9848 (2007). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9430-9435 (2006). [CrossRef]
- M. Haurylau, G. Chen, H. Chen, J. Zhang, N.A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, "On-chip optical interconnect roadmap: challenges and critical directions," IEEE J. Sel. Top. Quantum Electron. 12, 1699-1705 (2006). [CrossRef]
- H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang, and M. Paniccia, "An all-silicon Raman laser," Nature 433, 292-294 (2005). [CrossRef] [PubMed]
- Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005). [CrossRef] [PubMed]
- M. Rouviere, M. Halbwax, J. L. Cercus, E. Cassan, L. Vivien, D. Pascal, M. Heitzmann, and J. M. Hartmann, "Integration of germanium waveguide photodetectors for intrachip optical interconnects," Opt. Eng. 44, 75402-75406 (2005). [CrossRef]
- A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004). [CrossRef] [PubMed]
- G. Dehlinger, S. J. Koester, J. D. Schaub, J. O. Chu, Q. C. Ouyang, and A. Grill, "High-speed Germanium-on-SOI lateral PIN photodiodes," IEEE Photon. Technol. Lett. 16, 2547-2549 (2004). [CrossRef]
- D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000). [CrossRef]
- Q. Tong, L. Huang, and U. Gosele, "Transfer of semiconductor and oxide films by wafer bonding and layer cutting," J. Electron. Maters 29, 928-932 (2000). [CrossRef]
- B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring resonator arrays for VLSI photonics,". IEEE Photon. Technol. Lett. 12, 323-325 (2000). [CrossRef]
- S. Y. Chou, W. Khalil, T. Y. Hsiang, and S. Alexandrou, "Ultrafast nanoscale metal-semiconductor-metal photodetectors on bulk and low-temperature grown GaAs," Appl. Phys. Lett. 61, 819-821 (1992). [CrossRef]
- W.C. Dash and R. Newman, "Intrinsic optical absorption in single crystal germanium and silicon at 77oK and 300oK," Phys. Rev. 99, 1151-1155 (1955). [CrossRef]
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