OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 10 — May. 11, 2009
  • pp: 8246–8252

Influence of plasma treatment on laser-induced damage characters of HfO2 thin films at 355nm

Dongping Zhang, Congjuan Wang, Ping Fan, Xingmin Cai, Zhuanghao Zheng, Jianda Shao, and Zhengxiu Fan  »View Author Affiliations


Optics Express, Vol. 17, Issue 10, pp. 8246-8252 (2009)
http://dx.doi.org/10.1364/OE.17.008246


View Full Text Article

Enhanced HTML    Acrobat PDF (313 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

HfO2 thin films were deposited by e-beam evaporation, and were post-treated with plasma under different flow rate ratios of argon to oxygen. By measuring the surface defect density, weak absorption, laser-induced damage threshold (LIDT) and damage morphology, the influence of the flow rate ratio of argon to oxygen on the laser-induced damage characters of HfO2 thin films were analyzed. The experimental results show that plasma treatment is effective in reducing the surface defect density of thin films. Compared with the as-grown sample, the absorption reduction is obvious after plasma treatment when argon and oxygen flow rate ratio is 5:25, but the absorption increases gradually with the continued increase of argon and oxygen flow rate ratio. LIDT measurements in 1-on-1 mode demonstrate that plasma treatment is not effective in improving LIDT of the samples at 355 nm. Damage morphologies reveal that the LIDT is dominated by nanoscale absorbing defects in subsurface layers, which agrees well with our numerical simulation result based on a spherical absorber model.

© 2009 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization

ToC Category:
Thin Films

History
Original Manuscript: March 13, 2009
Revised Manuscript: April 20, 2009
Manuscript Accepted: April 21, 2009
Published: April 30, 2009

Citation
Dongping Zhang, Congjuan Wang, Ping Fan, Xingmin Cai, Zhuanghao Zheng, Jianda Shao, and Zhengxiu Fan, "Influence of plasma treatment on laser-induced damage characters of HfO2 thin films at 355nm," Opt. Express 17, 8246-8252 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-10-8246


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. M. Reichling, A. Bodeman, and N. Kaiser "New insight into defect-induced laser damage in UV multilayer coatings," Proc. SPIE 2428, 307-316 (1995). [CrossRef]
  2. H. S. Bennett, "Absorbing centers in laser materials," J. Appl. Phys. 42, 619-630 (1971). [CrossRef]
  3. Z. L. Wu, C. J. Stolz, S. C. Weakley, J. D. Hughes, and Q. Zhao, "Damage threshold prediction of hafnia-silica multilayer coatings by nondestructive evaluation of fluence-limiting defects," Appl. Opt. 40,1897-1906 (2001). [CrossRef]
  4. M. Reichling, A. Bodemann, and N. Kaiser, "Defect induced laser damage in oxide multilayer coatings for 246nm," Thin Solid Films 320, 264-279 (1998). [CrossRef]
  5. S. G. Wu, J. D. Shao, Z. X. Fan, "Negative-ion element impurities breakdown model," Acta Phys. Sin. 55, 1987-1990 (2006).
  6. T. A. Wiggins and R. S. Reid, "Observation and morphology of small-scale laser induced damage," Appl. Opt. 21, 1675-1680 (1982). [CrossRef] [PubMed]
  7. J. Dijon, T. Poiroux, and C. Desrumaux, "Nano absorbing centers: a key point in laser damage of thin films," Proc. SPIE 2966, 315-325 (1997). [CrossRef]
  8. S. Papernov, A. Schmid, J. Anzelotti, D. Smith, and Z. Chrzan, "AFM-mapped, nanoscale, absorber-driven laser damage in UV high reflector multilayer," Proc. SPIE 2714, 384-394 (1996). [CrossRef]
  9. R. Chow, S. Falabella, G. E. Loomis, F. Rainer, C. J. Stolz, and M. R. Kozlowski, "Reactive evaporation of low-defect density hafnia," Appl. Opt. 32, 5567-5574 (1993). [CrossRef] [PubMed]
  10. C. Y. Wei, H. B. He, J. D. Shao, T. Wang, D. P. Zhang, and Z. X. Fan, "Effects of CO2 laser conditioning of the antireflection Y2O3/SiO2 coatings at 351 nm," Opt. Commun. 252, 336-343 (2005). [CrossRef]
  11. L. Yuan, C. J. Wang, Y. A. Zhao, and J. D. Shao, "Influence of oxygen post-treatment on laser-induced damage of antireflection coatings prepared by electron-beam evaporation and ion beam assisted deposition," Appl. Surf. Sci. 254, 6346-6349 (2008). [CrossRef]
  12. M. Alvisi, F. D. Tomasi, and M. R. Perrone, "Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films," Thin Solid Films 396, 44-52 (2001). [CrossRef]
  13. F. Rainer, W. H. Lowdermilk, D. Milam, C. K. Carniglia, T. T. Hart, and T. L. Lichtenstein, "Materials for optical coatings in the ultraviolet," Appl. Opt. 24, 496-500 (1985). [CrossRef] [PubMed]
  14. D. P. Zhang, J. D. Shao, D. W. Zhang, S. H. Fan, T. Y. Tan, and Z. X. Fan, "Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO2 films prepared by the electron-beam evaporation method," Opt. Lett. 29, 2870-2872 (2004). [CrossRef]
  15. Z. L. Wu, R. K. Kuo, Y. S. Lu, and S. T. Gu, "Laser-induced surface thermal lensing for thin film characterizations," Proc. SPIE 2714, 294-304 (1996). [CrossRef]
  16. M. Commandre and P. Roche, "Characterization of optical coating by photothermal deflection," Appl. Opt. 35, 5021-5034 (1996). [CrossRef] [PubMed]
  17. ISO 11254-1:2000, Lasers and laser-related equipment—Determination of laser-induced damage threshold of optical surfaces—Part I: 1-on-1 test.
  18. D. P. Zhang, J. D. Shao, Y. A. Zhao, S. H. Fan, R. J. Hong, and Z. X. Fan, "Laser-induced damage threshold of ZrO2 thin films prepared at different oxygen partial pressures by electron-beam evaporation," J. Vac. Sci. Technol. A 23,197-200 (2005). [CrossRef]
  19. H. Goldenberg and C. J. Tranter, "Heat flow in an infinite medium heated by a sphere," Br. J. Appl. Phys. 3, 296-301 (1952). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited