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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 10 — May. 11, 2009
  • pp: 8641–8650

Study of the new ellipsometric measurement method using integrated analyzer in parallel mode

Peng-Hui Mao, Yu-Xiang Zheng, Yue-Rui Chen, Qing-Yuan Cai, Rong-Jun Zhang, and Liang-Yao Chen  »View Author Affiliations

Optics Express, Vol. 17, Issue 10, pp. 8641-8650 (2009)

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A new type of ellipsometer using an integrated analyzer composed of 12 sub-analyzers with different azimuth angles was constructed and studied. By using a two-dimensional CCD array camera to measure the light intensity emerging in parallel from each sub-analyzer with the azimuth angles uniformly distributed in the range of about 180°, the ellipsometric parameters were extracted within the data acquisition time less than 1 second. The ellipsometric parameters for the polished bulk Si sample were measured to show good agreement with the results measured by using another two ellipsometric methods. The new method having the merits of high speed and reliability in the optical data measurement can be potentially used in the fields where the in situ data acquisition with high precision is the key issue as required.

© 2009 OSA

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.5430) Physical optics : Polarization
(120.3688) Instrumentation, measurement, and metrology : Lightwave analyzers

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: April 2, 2009
Revised Manuscript: April 29, 2009
Manuscript Accepted: May 2, 2009
Published: May 7, 2009

Peng-Hui Mao, Yu-Xiang Zheng, Yue-Rui Chen, Qing-Yuan Cai, Rong-Jun Zhang, and Liang-Yao Chen, "Study of the new ellipsometric measurement method using integrated analyzer in parallel mode," Opt. Express 17, 8641-8650 (2009)

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