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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 10 — May. 11, 2009
  • pp: 8641–8650

Study of the new ellipsometric measurement method using integrated analyzer in parallel mode

Peng-Hui Mao, Yu-Xiang Zheng, Yue-Rui Chen, Qing-Yuan Cai, Rong-Jun Zhang, and Liang-Yao Chen  »View Author Affiliations


Optics Express, Vol. 17, Issue 10, pp. 8641-8650 (2009)
http://dx.doi.org/10.1364/OE.17.008641


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Abstract

A new type of ellipsometer using an integrated analyzer composed of 12 sub-analyzers with different azimuth angles was constructed and studied. By using a two-dimensional CCD array camera to measure the light intensity emerging in parallel from each sub-analyzer with the azimuth angles uniformly distributed in the range of about 180°, the ellipsometric parameters were extracted within the data acquisition time less than 1 second. The ellipsometric parameters for the polished bulk Si sample were measured to show good agreement with the results measured by using another two ellipsometric methods. The new method having the merits of high speed and reliability in the optical data measurement can be potentially used in the fields where the in situ data acquisition with high precision is the key issue as required.

© 2009 OSA

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(260.5430) Physical optics : Polarization
(120.3688) Instrumentation, measurement, and metrology : Lightwave analyzers

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: April 2, 2009
Revised Manuscript: April 29, 2009
Manuscript Accepted: May 2, 2009
Published: May 7, 2009

Citation
Peng-Hui Mao, Yu-Xiang Zheng, Yue-Rui Chen, Qing-Yuan Cai, Rong-Jun Zhang, and Liang-Yao Chen, "Study of the new ellipsometric measurement method using integrated analyzer in parallel mode," Opt. Express 17, 8641-8650 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-10-8641


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References

  1. R. H. Muller, “Present status of automatic ellipsometers,” Surf. Sci. 56, 19–36 (1976). [CrossRef]
  2. R. M. A. Azzam, and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  3. P. S. Hauge, “Recent developments in instrumentation in ellipsometry,” Surf. Sci. 96(1-3), 108–140 (1980). [CrossRef]
  4. J. A. Woollam, P. G. Snyder, and M. C. Rost, “Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials,” Thin Solid Films 166, 317–323 (1988). [CrossRef]
  5. R. W. Collins, “Automatic rotating element ellipsometers: Calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61(8), 2029–2062 (1990). [CrossRef]
  6. K. Vedam, “Spectroscopic ellipsometry: a historical overview,” Thin Solid Films 313–314(1-2), 1–9 (1998). [CrossRef]
  7. D. E. Aspnes, “Expanding horizons: new developments in ellipsometry and polarimetry,” Thin Solid Films 455–456, 3–13 (2004). [CrossRef]
  8. R. H. Muller and J. C. Farmer, “Fast, self-compensating spectral-scanning ellipsometer,” Rev. Sci. Instrum. 55(3), 371–374 (1984). [CrossRef]
  9. Y. T. Kim, R. W. Collins, and K. Vedam, “Fast scanning spectroelectrochemical ellipsometry: In-situ characterization of gold oxide,” Surf. Sci. 233(3), 341–350 (1990). [CrossRef]
  10. I. An and R. W. Collins, “Waveform analysis with optical multichannnel detectors: Applications for rapid-scan spectroscopic ellipsometry,” Rev. Sci. Instrum. 62(8), 1904–1911 (1991). [CrossRef]
  11. I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, “Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation,” Rev. Sci. Instrum. 65(11), 3489–3500 (1994). [CrossRef]
  12. P. Boher and J. L. Stehle, “In situ spectroscopic ellipsometry: present status and future needs for thin film characterization and process control,” Mater. Sci. Eng. B 37(1-3), 116–120 (1996). [CrossRef]
  13. R. M. A. Azzam, “Multichannel polarization state detectors for time-resolved ellipsometry,” Thin Solid Films 234(1-2), 371–374 (1993). [CrossRef]
  14. E. Collett, “Determination of the ellipsometric characteristics of optical surfaces using nanosecond laser pulses,” Surf. Sci. 96(1-3), 156–167 (1980). [CrossRef]
  15. S. N. Japerson and S. E. Schnatterly, “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique,” Rev. Sci. Instrum. 40(6), 761–767 (1969). [CrossRef]
  16. V. M. Bermudez and V. H. Ritz, “Wavelength-scanning polarization-modulation ellipsometry: some practical considerations,” Appl. Opt. 17(4), 542–552 (1978). [CrossRef] [PubMed]
  17. E. Huber, N. Baltzer, and M. von Allmen, “Polarization modulation ellipsometry: A compact and easy handling instrument,” Rev. Sci. Instrum. 56(12), 2222–2227 (1985). [CrossRef]
  18. G. E. Jellison and F. A. Modine, “Two-channel polarization modulation ellipsometer,” Appl. Opt. 29(7), 959–974 (1990). [CrossRef] [PubMed]
  19. B. D. Cahan and R. F. Spanier, “A high speed precision automatic ellipsometer,” Surf. Sci. 16, 166–176 (1969). [CrossRef]
  20. R. W. Stobie, B. Rao, and M. J. Dignam, “Analysis of a novel ellipsometric technique with special advantages for infrared spectroscopy,” J. Opt. Soc. Am. 65(1), 25–28 (1975). [CrossRef]
  21. C. V. Kent and J. Lawson, “A Photoelectric Method for the Determination of the Parameters of Elliptically Polarized Light,” J. Opt. Soc. Am. 27(3), 117–119 (1937). [CrossRef]
  22. D. E. Aspnes, “Fourier transform detection system for rotating-analyzer ellipsometers,” Opt. Commun. 8(3), 222–225 (1973). [CrossRef]
  23. D. E. Aspnes and A. A. Studna, “High Precision Scanning Ellipsometer,” Appl. Opt. 14, 220–228 (1975). [PubMed]
  24. M. Schubert, B. Rheinländer, J. A. Woollam, B. Johs, C. M. Herzinger, B. Johs, and C. M. Herzinger, “Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2,” J. Opt. Soc. Am. A 13(4), 875–883 (1996). [CrossRef]
  25. R. M. A. Azzam, “A simple Fourier photopolarimeter with rotating polarizer and analyzer for measuring Jones and Mueller matrices,” Opt. Commun. 25(2), 137–140 (1978). [CrossRef]
  26. L. Y. Chen and D. W. Lynch, “Scanning ellipsometer by rotating polarizer and analyzer,” Appl. Opt. 26(24), 5221–5228 (1987). [CrossRef] [PubMed]
  27. L. Y. Chen, X. W. Feng, Y. Su, H. Z. Ma, and Y. H. Qian, “Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer,” Appl. Opt. 33(7), 1299–1305 (1994). [CrossRef] [PubMed]

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