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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 10 — May. 11, 2009
  • pp: 8685–8695

Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame  »View Author Affiliations


Optics Express, Vol. 17, Issue 10, pp. 8685-8695 (2009)
http://dx.doi.org/10.1364/OE.17.008685


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Abstract

We report on the fabrication of shape-controlled microchannels in fused silica by femtosecond laser irradiation at 600 kHz repetition rate followed by chemical etching. The shape control is achieved by suitable wobbling of the glass substrate during the irradiation process. Cylindrical microchannels with uniform cross-sections are demonstrated with an unprecedented length of 4 mm. Some applications are also addressed: connection of two microchannels with a smaller one, 3D microchannel adapter and fabrication of O-grooves for easy fiber-to-waveguide coupling.

© 2009 OSA

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3390) Other areas of optics : Laser materials processing

ToC Category:
Laser Micromachining

History
Original Manuscript: April 10, 2009
Revised Manuscript: May 1, 2009
Manuscript Accepted: May 4, 2009
Published: May 8, 2009

Citation
Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame, "Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching," Opt. Express 17, 8685-8695 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-10-8685


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