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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 10 — May. 11, 2009
  • pp: 8685–8695

Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching

Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame  »View Author Affiliations

Optics Express, Vol. 17, Issue 10, pp. 8685-8695 (2009)

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We report on the fabrication of shape-controlled microchannels in fused silica by femtosecond laser irradiation at 600 kHz repetition rate followed by chemical etching. The shape control is achieved by suitable wobbling of the glass substrate during the irradiation process. Cylindrical microchannels with uniform cross-sections are demonstrated with an unprecedented length of 4 mm. Some applications are also addressed: connection of two microchannels with a smaller one, 3D microchannel adapter and fabrication of O-grooves for easy fiber-to-waveguide coupling.

© 2009 OSA

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3390) Other areas of optics : Laser materials processing

ToC Category:
Laser Micromachining

Original Manuscript: April 10, 2009
Revised Manuscript: May 1, 2009
Manuscript Accepted: May 4, 2009
Published: May 8, 2009

Krishna Chaitanya Vishnubhatla, Nicola Bellini, Roberta Ramponi, Giulio Cerullo, and Roberto Osellame, "Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching," Opt. Express 17, 8685-8695 (2009)

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  1. M. J. Madou, Fundamentals of microfabrication: the science of miniaturization (CRC Press, 2002).
  2. G. M. Whitesides, “The origins and the future of microfluidics,” Nature 442(7101), 368-373 (2006). [CrossRef] [PubMed]
  3. A. J. DeMello, “Control and detection of chemical reactions in microfluidic systems,” Nature 442(7101), 394-402 (2006). [CrossRef] [PubMed]
  4. A. Marcinkevi Ius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277-279 (2001). [CrossRef]
  5. Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express 12(10), 2120-2129 (2004). [CrossRef] [PubMed]
  6. C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys., A Mater. Sci. Process. 84(1-2), 47-61 (2006). [CrossRef]
  7. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, P. Laporta, L. Magagnin, and P. L. Cavallotti, “Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching,” Appl. Phys. Lett. 88, 191107 (2006).
  8. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser,” Opt. Lett. 28(1), 55-57 (2003). [CrossRef] [PubMed]
  9. Y. Sikorski, C. Rablau, M. Dugan, A. A. Said, P. Bado, and L. G. Beholz, “Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching,” Appl. Opt. 45(28), 7519-7523 (2006). [CrossRef] [PubMed]
  10. K. Sugioka, Y. Cheng, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture,” Appl. Phys. A: Mater. Sci. Process 81, 1-10 (2005).
  11. Y. Bellouard, A. A. Said, and P. Bado, “Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica,” Opt. Express 13(17), 6635-6644 (2005). [CrossRef] [PubMed]
  12. R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2(4), 219-225 (2008). [CrossRef]
  13. R. Osellame, V. Maselli, R. Martinez Vazquez, R. Ramponi, and G. Cerullo, “Integration of optical waveguides and microfluidic channels both fabricated by femtosecond laser irradiation,” Appl. Phys. Lett. 90(23), 231118 (2007). [CrossRef]
  14. A. Agarwal and M. Tomozawa, “Correlation of silica glass properties with the infrared spectra,” J. Non-Cryst. Solids 209(1-2), 166-174 (1997). [CrossRef]
  15. R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, M. Mehandale, V. R. Bhardwaj, and P. B. Corkum, “Ultra-high resolution index of refraction profiles of femtosecond laser modified silica structures,” Opt. Express 11, 775-780 (2003). [CrossRef] [PubMed]
  16. R. Taylor, C. Hnatovsky, and E. Simova, “Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass,” Laser Photon. Rev. 2(1-2), 26-46 (2008). [CrossRef]
  17. R. Osellame, N. Chiodo, G. della Valle, S. Taccheo, R. Ramponi, G. Cerullo, A. Killi, U. Morgner, M. Lederer, and D. Kopf, “Optical waveguide writing with a diode-pumped femtosecond oscillator,” Opt. Lett. 29(16), 1900-1902 (2004). [CrossRef] [PubMed]
  18. S. M. Eaton, H. Zhang, M. L. Ng, J. Li, W.-J. Chen, S. Ho, and P. R. Herman, “Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides,” Opt. Express 16(13), 9443-9458 (2008). [CrossRef] [PubMed]
  19. A. Killi, A. Steinmann, J. Dörring, U. Morgner, M. J. Lederer, D. Kopf, and C. Fallnich, “High-peak-power pulses from a cavity-dumped Yb:KY(WO4)2 oscillator,” Opt. Lett. 30(14), 1891-1893 (2005). [CrossRef] [PubMed]
  20. K. C. Vishnubhatla, J. Clark, G. Lanzani, R. Ramponi, R. Osellame, and T. Virgili, “Ultrafast optofluidic gain switch based on conjugated polymer in femtosecond laser fabricated microchannels,” Appl. Phys. Lett. 94(4), 041123 (2009). [CrossRef]
  21. D. Psaltis, S. R. Quake, and C. Yang, “Developing optofluidic technology through the fusion of microfluidics and optics,” Nature 442(7101), 381-386 (2006). [CrossRef] [PubMed]

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