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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 12 — Jun. 8, 2009
  • pp: 10044–10049

Laser drilling of nano-pores in sandwiched thin glass membranes

Minrui Yu, Hyun-Seok Kim, and Robert H. Blick  »View Author Affiliations


Optics Express, Vol. 17, Issue 12, pp. 10044-10049 (2009)
http://dx.doi.org/10.1364/OE.17.010044


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Abstract

We report on a novel method of using an excimer laser to drill ultra-small pores in borosilicate glass membranes. By introducing a thin layer of liquid between sandwiches of two glass slides, we can shrink the pore size and smoothen the surface on the exit side. We are able to push the minimal exit pore diameter down to 90 nm, well below the laser wavelength of 193 nm. This is achieved with substrates over 150 µm thick. Compared to other methods, this technique is fast, inexpensive, and produces high quality smooth pores.

© 2009 OSA

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(350.3390) Other areas of optics : Laser materials processing
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Laser Microfabrication

History
Original Manuscript: March 13, 2009
Revised Manuscript: May 18, 2009
Manuscript Accepted: May 27, 2009
Published: June 1, 2009

Virtual Issues
Vol. 4, Iss. 8 Virtual Journal for Biomedical Optics

Citation
Minrui Yu, Hyun-Seok Kim, and Robert H. Blick, "Laser drilling of nano-pores in sandwiched thin glass membranes," Opt. Express 17, 10044-10049 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-12-10044


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