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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 13 — Jun. 22, 2009
  • pp: 11066–11076

Optimized grating coupler with fully etched slots

Bernd Schmid, Alexander Petrov, and Manfred Eich  »View Author Affiliations

Optics Express, Vol. 17, Issue 13, pp. 11066-11076 (2009)

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A grating coupler with fully etched slots is optimized for fiber coupling into SOI slab waveguides. Such coupler can be produced in one lithography step together with other SOI components. Theoretical maximal coupling efficiency of 49% is demonstrated with a 3dB bandwidth of 35nm. Strong reflection from the fully etched grating was avoided through an antireflection interface. Constructive interference is used to decrease radiation into the substrate and the filling factor is optimized for optimal power coupling into the fiber mode. It was also demonstrated, that the chirped grating approach is inapplicable for fully etched gratings.

© 2009 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices

ToC Category:
Integrated Optics

Original Manuscript: March 2, 2009
Revised Manuscript: May 8, 2009
Manuscript Accepted: June 9, 2009
Published: June 18, 2009

Bernd Schmid, Alexander Petrov, and Manfred Eich, "Optimized grating coupler with fully etched slots," Opt. Express 17, 11066-11076 (2009)

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