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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 14 — Jul. 6, 2009
  • pp: 11366–11370

High confinement micron-scale silicon nitride high Q ring resonator

Alexander Gondarenko, Jacob S. Levy, and Michal Lipson  »View Author Affiliations

Optics Express, Vol. 17, Issue 14, pp. 11366-11370 (2009)

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We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3∗106 operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.

© 2009 OSA

OCIS Codes
(130.3130) Integrated optics : Integrated optics materials
(140.3945) Lasers and laser optics : Microcavities

ToC Category:
Integrated Optics

Original Manuscript: April 28, 2009
Revised Manuscript: June 17, 2009
Manuscript Accepted: June 18, 2009
Published: June 23, 2009

Alexander Gondarenko, Jacob S. Levy, and Michal Lipson, "High confinement micron-scale silicon nitride high Q ring resonator," Opt. Express 17, 11366-11370 (2009)

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  1. K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008). [CrossRef]
  2. J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007). [CrossRef]
  3. S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005). [CrossRef]
  4. A. Serpengüzel, “Amorphous silicon nitride microcavities,” J. Opt. Soc. Am. B 18(7), 989–993 (2001). [CrossRef]
  5. N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4-6), 453–458 (2004). [CrossRef]
  6. C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007). [CrossRef]
  7. K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Near-field modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008). [CrossRef]
  8. L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008). [CrossRef]
  9. M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005). [CrossRef]
  10. J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS, 2, pp. 745, (2004).
  11. E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics, FMG4 (2008).
  12. A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008). [CrossRef]
  13. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003). [CrossRef]
  14. M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007). [CrossRef]
  15. P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005). [CrossRef]

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