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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 14 — Jul. 6, 2009
  • pp: 11739–11746

Design and fabrication of Poly(dimethylsiloxane) single-mode rib waveguide

Jack Sheng Kee, Daniel Puiu Poenar, Pavel Neuzil, and Levent Yobas  »View Author Affiliations

Optics Express, Vol. 17, Issue 14, pp. 11739-11746 (2009)

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We have designed, fabricated and characterized poly(dimethylsiloxane) (PDMS) single-mode rib waveguides. PDMS was chosen specifically for the core and cladding. Combined with the soft lithography fabrication techniques, it enables an easy integration of microoptical components for lab-on-a-chip systems. The refractive index contrast, Δ of 0.07% between the core and cladding for single-mode propagation was achieved by modifying the properties of the same base material. Alternatively, a higher refractive index contrast, Δ of 1.18% was shown by using PDMS materials from two different manufacturers. The fabricated rib waveguides were characterized for mode profile characteristics and confirmed the excitation of the fundamental mode of the waveguide. The propagation loss of the single-mode rib waveguide was characterized using the cutback measurement method at a wavelength of 635 nm and found to be 0.48 dB/cm for Δ of 0.07% and 0.20 dB/cm for Δ of 1.18%. Y-branch splitter of PDMS single-mode rib waveguide was further demonstrated.

© 2009 OSA

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.7390) Optical devices : Waveguides, planar
(130.5460) Integrated optics : Polymer waveguides

ToC Category:
Integrated Optics

Original Manuscript: March 25, 2009
Revised Manuscript: May 15, 2009
Manuscript Accepted: May 16, 2009
Published: June 29, 2009

Virtual Issues
Vol. 4, Iss. 9 Virtual Journal for Biomedical Optics

Jack Sheng Kee, Daniel Puiu Poenar, Pavel Neuzil, and Levent Yobas, "Design and fabrication of Poly(dimethylsiloxane) single-mode rib waveguide," Opt. Express 17, 11739-11746 (2009)

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  1. S. K. Sia and G. M. Whitesides, “Microfluidic devices fabricated in poly(dimethylsiloxane) for biological studies,” Electrophoresis 24(21), 3563–3576 (2003). [CrossRef]
  2. B. Kuswandi, J. Nuriman, J. Huskens, and W. Verboom, “Optical sensing systems for microfluidic devices: a review,” Anal. Chim. Acta 601(2), 141–155 (2007). [CrossRef]
  3. E. Verpoorte, “Chip vision-optics for microchips,” Lab Chip 3(3), 42N–52N (2003).
  4. Q. Kou, I. Yesilyurt, V. Studer, M. Belotti, E. Cambril, and Y. Chen, “On-chip optical components and microfluidic systems,” Microelectron. Eng. 73, 876–880 (2004). [CrossRef]
  5. S. Camou, H. Fujita, and T. Fujii, “PDMS 2D optical lens integrated with microfluidic channels: principle and characterization,” Lab Chip 3(1), 40–45 (2003). [CrossRef]
  6. A. Llobera, R. Wilke, and S. Büttgenbach, “Poly(dimethylsiloxane) hollow Abbe prism with microlenses for detection based on absorption and refractive index shift,” Lab Chip 4(1), 24–27 (2004). [CrossRef]
  7. B. G. Splawn and F. E. Lytle, “On-chip absorption measurements using an integrated waveguide,” Anal. Bioanal. Chem. 373(7), 519–525 (2002). [CrossRef]
  8. D. A. Chang-Yen, R. K. Eich, and B. K. Gale, “A monolithic PDMS waveguide system fabricated using soft-lithography techniques,” IEEE J. Lightwave Technol. 6(6), 2088–2093 (2005). [CrossRef]
  9. J. S. Kee, D. P. Poenar, P. Neuzil, and L. Yobas, “Monolithic Integration of Poly(dimethylsiloxane) Waveguides and Microfluidics for On-Chip Absorbance Measurements,” Sens. Actuators B Chem. 134(2), 532–538 (2008). [CrossRef]
  10. S. Kopetz, D. Cai, E. Rabe, and A. Neyer, “PDMS-based optical waveguide layer for integration in electrical-optical circuit boards,” Int. J. Electron. Commun. 61(3), 163–167 (2007) (AEU). [CrossRef]
  11. R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single-Mode Rib Waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron. 27(8), 1971 (1991). [CrossRef]
  12. S. P. Pogossian, L. Vescan, and A. Vonsovici, “The Single-Mode Condition for Semiconductor Rib Waveguides with Large Cross Section,” IEEE J. Lightwave Technol. 16(10), 1851 (1998). [CrossRef]
  13. J. Lousteau, D. Furniss, A. B. Seddon, T. M. Benson, A. Vukovic, and P. Sewell, “The Single-Mode Condition for Silicon-on-Insulator Optical Rib Waveguides with Large Cross Section,” IEEE J. Lightwave Technol. 22(8), 1923–1929 (2004). [CrossRef]
  14. S. P. Chan, C. E. Png, S. T. Lim, G. T. Reed, and V. M. N. Passaro, “Single-Mode and Polarization-Independent Silicon-on-Insulator Waveguides with Small Cross Section,” IEEE J. Lightwave Technol. 23(6), 2103–2111 (2005). [CrossRef]
  15. K. S. Ryu, X. Wang, K. Shaikh, and C. Liu, “A Method for Precision Patterning of Silicone Elastomer and Its Applications,” IEEE J. Microelectromech. Syst. 13(4), 568–575 (2004). [CrossRef]
  16. F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 (1994). [CrossRef]
  17. F. Ladouceur, “Roughness, Inhomogeneity, and Integrated Optics,” IEEE J. Lightwave Technol. 15(6), 1020–1025 (1997). [CrossRef]

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