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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 14 — Jul. 6, 2009
  • pp: 11884–11891

Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution

Sahnggi Park, Kap-Joong Kim, Jong-Moo Lee, In-Gyoo Kim, and Gyungock Kim  »View Author Affiliations


Optics Express, Vol. 17, Issue 14, pp. 11884-11891 (2009)
http://dx.doi.org/10.1364/OE.17.011884


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Abstract

It is shown that the resonant frequencies and the transmission spectra of ring resonators can be adjusted by depositing or etching the cladding nitride layer on the ring waveguide without introducing an extra loss or extra variations of channel spacing. The cladding nitride layer increases the minimum width of the gap in the coupling region to larger than 150nm which makes it possible to consider photolithography instead of E-beam lithography for the typical design rule of ring filters. KOH silicon etching can also adjust not only the resonance frequencies but also coupling coefficients with a small sacrifice of guiding loss.

© 2009 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.7390) Optical devices : Waveguides, planar
(130.7408) Integrated optics : Wavelength filtering devices

ToC Category:
Integrated Optics

History
Original Manuscript: May 26, 2009
Revised Manuscript: June 25, 2009
Manuscript Accepted: June 25, 2009
Published: June 29, 2009

Citation
Sahnggi Park, Kap-Joong Kim, Jong-Moo Lee, In-Gyoo Kim, and Gyungock Kim, "Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution," Opt. Express 17, 11884-11891 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-14-11884


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References

  1. H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, “Low-threshold continuous-wave Raman silicon laser,” Nat. Photonics 1(4), 232–237 (2007). [CrossRef]
  2. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005). [CrossRef]
  3. J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express 16(22), 18340–18344 (2008). [CrossRef]
  4. Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, “Cascaded silicon micro-ring modulators for WDM optical interconnection,” Opt. Express 14(20), 9431–9435 (2006). [CrossRef]
  5. Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008). [CrossRef]
  6. T. Barwicz, M. A. Popović, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, “Microring-resonator-based add-drop filters in SiN: fabrication and analysis,” Opt. Express 12(7), 1437–1442 (2004). [CrossRef]
  7. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion,” Opt. Express 15(22), 14765–14771 (2007). [CrossRef]
  8. A. Melloni, “Synthesis of a parallel-coupled ring-resonator filter,” Opt. Lett. 26(12), 917–919 (2001). [CrossRef]
  9. B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, “Very High-Order Microring Resonator Filters for WDM applications,” IEEE Photon. Technol. Lett. 16(10), 2263–2265 (2004). [CrossRef]
  10. F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007). [CrossRef]
  11. J. M. Lee, S. Park, and G. Kim, “Multichannel silicon WDM ring filters fabricated with DUV lithography,” Opt. Commun. 281(17), 4302–4306 (2008). [CrossRef]
  12. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple- channel silicon micro-resonator based filters for WDM applications,” Opt. Express 15(12), 7489–7498 (2007). [CrossRef]
  13. F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, “Coupled resonator optical waveguides based on silicon-on-insulator photonic wires,” Appl. Phys. Lett. 89(4), 041122 (2006). [CrossRef]
  14. J. K. S. Poon, J. Scheuer, Y. Xu, and A. Yariv, “Designing coupled-resonator optical waveguide delay lines,” J. Opt. Soc. Am. B 21(9), 1665–1673 (2004). [CrossRef]
  15. Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, “Dense wavelength conversion and multicasting in a resonance-split silicon microring,” Appl. Phys. Lett. 93(8), 081113 (2008). [CrossRef]
  16. Q. Xu, V. R. Almeida, and M. Lipson, “Micrometer-scale all-optical wavelength converter on silicon,” Opt. Lett. 30(20), 2733–2735 (2005). [CrossRef]
  17. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29(24), 2861–2863 (2004). [CrossRef]
  18. S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express 15(22), 14467–14475 (2007). [CrossRef]
  19. M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, “Tunable silicon microring resonator with wide free spectral range,” Appl. Phys. Lett. 89(7), 071110 (2006). [CrossRef]
  20. Q. Xu, D. Fattal, and R. G. Beausoleil, “Silicon microring resonators with 1.5-microm radius,” Opt. Express 16(6), 4309–4315 (2008). [CrossRef]
  21. W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85(23), 5523 (2004). [CrossRef]
  22. J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, “Controlling temperature dependence of silicon waveguide using slot structure,” Opt. Express 16(3), 1645–1652 (2008). [CrossRef]
  23. M. A. Popovic, C. Manolatou, and M. R. Watts, “Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters,” Opt. Express 14(3), 1208–1222 (2006). [CrossRef]
  24. T. Naganawa, H. Haeiwa, and Y. Kokubun, “UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter,” Jpn. J. Appl. Phys. 43(No. 8B), 5780–5784 (2004). [CrossRef]
  25. Technology paper LETI_03, Jan. 5. 2009, http://www.epixfab.eu/uploads/media/Technology_LETI_03.pdf .

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