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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 14 — Jul. 6, 2009
  • pp: 11884–11891

Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution

Sahnggi Park, Kap-Joong Kim, Jong-Moo Lee, In-Gyoo Kim, and Gyungock Kim  »View Author Affiliations

Optics Express, Vol. 17, Issue 14, pp. 11884-11891 (2009)

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It is shown that the resonant frequencies and the transmission spectra of ring resonators can be adjusted by depositing or etching the cladding nitride layer on the ring waveguide without introducing an extra loss or extra variations of channel spacing. The cladding nitride layer increases the minimum width of the gap in the coupling region to larger than 150nm which makes it possible to consider photolithography instead of E-beam lithography for the typical design rule of ring filters. KOH silicon etching can also adjust not only the resonance frequencies but also coupling coefficients with a small sacrifice of guiding loss.

© 2009 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.7390) Optical devices : Waveguides, planar
(130.7408) Integrated optics : Wavelength filtering devices

ToC Category:
Integrated Optics

Original Manuscript: May 26, 2009
Revised Manuscript: June 25, 2009
Manuscript Accepted: June 25, 2009
Published: June 29, 2009

Sahnggi Park, Kap-Joong Kim, Jong-Moo Lee, In-Gyoo Kim, and Gyungock Kim, "Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution," Opt. Express 17, 11884-11891 (2009)

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