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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 15 — Jul. 20, 2009
  • pp: 12259–12268

Computation lithography: virtual reality and virtual virtuality

Edmund Y. Lam and Alfred K. K. Wong  »View Author Affiliations

Optics Express, Vol. 17, Issue 15, pp. 12259-12268 (2009)

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Computation lithography is enabled by a combination of physical understanding, mathematical abstraction, and implementation simplification. An application in the virtual world of computation lithography can be a virtual reality or a virtual virtuality depending on its engineering sensible-ness and technical feasibility. Examples under consideration include design-for-manufacturability and inverse lithography.

© 2009 Optical Society of America

OCIS Codes
(110.3960) Imaging systems : Microlithography
(110.5220) Imaging systems : Photolithography
(110.1758) Imaging systems : Computational imaging

ToC Category:
Imaging Systems

Original Manuscript: March 3, 2009
Revised Manuscript: April 29, 2009
Manuscript Accepted: June 22, 2009
Published: July 6, 2009

Edmund Y. Lam and Alfred K. Wong, "Computation lithography: virtual reality and virtual virtuality," Opt. Express 17, 12259-12268 (2009)

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