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Non-thermal ablation of expanded polytetrafluoroethylene with an intense femtosecond-pulse laser
M. Hashida, H. Mishima, S. Tokita, and S. Sakabe »View Author Affiliations
1Institute for Chemical Research, Kyoto University, gokasho, Uji, Kyoto 611-0011, Japan
2Sumitomo Electric Industries, 1-1-3 Shimaya, Konohana-ku, Osaka 554-0024, Japan
3hashida@laser.kuicr.kyoto-u.ac.jp
Optics Express, Vol. 17, Issue 15, pp. 13116-13121 (2009)
http://dx.doi.org/10.1364/OE.17.013116
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Abstract
Ablation of expanded polytetrafluoroethylene without disruption of the fine porous structure is demonstrated using an intense femtosecond-pulse laser. As a result of laser-matter interactions near ablation threshold fluence, high-energy ions are emitted, which cannot be produced by thermal dissociation of the molecules. The ion energy is produced by Coulomb explosion of the elements of (-CF2-CF2-)n, and the energy spectra of the ions show contributions from the Coulomb explosions of the ions rather than those of thermal expansion to generate high-energy ions. The dependence of ion energy on the laser fluence of a 180-fs pulse, compared with that of a 400-ps pulse, also suggests that the high-energy ions are accelerated by Coulomb explosion.
© 2009 Optical Society of America
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.5470) Materials : Polymers
(240.6670) Optics at surfaces : Surface photochemistry
(020.2649) Atomic and molecular physics : Strong field laser physics
(310.6628) Thin films : Subwavelength structures, nanostructures
ToC Category:
Laser Micromachining
History
Original Manuscript: May 18, 2009
Revised Manuscript: July 9, 2009
Manuscript Accepted: July 10, 2009
Published: July 16, 2009
Citation
M. Hashida, H. Mishima, S. Tokita, and S. Sakabe, "Non-thermal ablation of expanded polytetrafluoroethylene with an intense femtosecond-pulse laser," Opt. Express 17, 13116-13121 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-15-13116
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References
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- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
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- B. N. Chichkoh, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, "Femtosecond, picosecondand nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
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- T. Lippert and J. T. Dickinson, "Chemical and spectroscopic aspects of polymer ablation: Special features and novel directions," Chem. Rev. 103, 453-485 (2003). [CrossRef] [PubMed]
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- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- T. Gumpenberger, J. Heitz, D. Bäuerle, T. C. Rosenmayer "Modification of expanded polytetrafluoroethylene by UV irradiation in reactive and inert atmosphere," Appl. Phys. A 80, 27-33 (2005). [CrossRef]
- Yu. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, Y. Izawa, "Ablation and amorphization of crystalline Si by femtosecond and picosecond laser irradiation," Jpn. J. Appl. Phys. 45, 5791-5794 (2006). [CrossRef]
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
- T. Gumpenberger, J. Heitz, D. Bäuerle, T. C. Rosenmayer "Modification of expanded polytetrafluoroethylene by UV irradiation in reactive and inert atmosphere," Appl. Phys. A 80, 27-33 (2005). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, E.W. Kreutz, "Picosecond laser ablation of thin copper films," Appl. Phys. A 63, 117-121 (1996). [CrossRef]
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
- M. Rauh, J. Ihlemann, A. Koch, "Laser surface roughening of PTFE for increased bonding strength," Appl. Phys. A 88, 231-233 (2007). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- T. Seideman, M. Yu. Ivanov, P. B. Corkum, "Role of electron localization in intense-field molecular ionization," Phys. Rev. Lett. 75, 2819-2822 (1995). [CrossRef] [PubMed]
- Yu. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, Y. Izawa, "Ablation and amorphization of crystalline Si by femtosecond and picosecond laser irradiation," Jpn. J. Appl. Phys. 45, 5791-5794 (2006). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- Yu. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, Y. Izawa, "Ablation and amorphization of crystalline Si by femtosecond and picosecond laser irradiation," Jpn. J. Appl. Phys. 45, 5791-5794 (2006). [CrossRef]
- J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, E.W. Kreutz, "Picosecond laser ablation of thin copper films," Appl. Phys. A 63, 117-121 (1996). [CrossRef]
- J. P. Jog, S. J. Walzade, S. V. Bhoraskar, "Study of localized states in FEP by space-charge limited current measurements," Polymer 23, 1622-1626 (1982). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- A. A. Serafetinides, M. I. Makropoulou, C. D. Skordoulis, A. K. Kar, "Ultra-short pulsed laser ablation of polymers," Appl. Surf. Sci. 180, 42-56 (2001). [CrossRef]
- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- M. Rauh, J. Ihlemann, A. Koch, "Laser surface roughening of PTFE for increased bonding strength," Appl. Phys. A 88, 231-233 (2007). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, E.W. Kreutz, "Picosecond laser ablation of thin copper films," Appl. Phys. A 63, 117-121 (1996). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, K. Toyoda, "Effect of pulse duration on ablation characteristics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys. 35, 101-106 (1996). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
- S. Kuper and M. Stuke, "Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses," Appl. Phys. Lett. 54, 4-6 (1989). [CrossRef]
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- T. Lippert, "Interaction of photons with polymers: From surface modification to ablation," Plasma Process Polym. 2, 525-546 (2005). [CrossRef]
- T. Lippert and J. T. Dickinson, "Chemical and spectroscopic aspects of polymer ablation: Special features and novel directions," Chem. Rev. 103, 453-485 (2003). [CrossRef] [PubMed]
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
- A. A. Serafetinides, M. I. Makropoulou, C. D. Skordoulis, A. K. Kar, "Ultra-short pulsed laser ablation of polymers," Appl. Surf. Sci. 180, 42-56 (2001). [CrossRef]
- K. P. Adhi, R. L. Owings, T. A. Railkar, W. D. Brown, A. P. Malshe, "Femtosecond ultraviolet (248nm) excimer laser processing of Teflon (PTFE)," Appl. Surf. Sci. 218, 17-23 (2003). [CrossRef]
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
- S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, K. Toyoda, "Effect of pulse duration on ablation characteristics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys. 35, 101-106 (1996). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
- M. Womack, M. Vendan and P. Molian, "Femtosecond pulsed laser ablation and deposition of thin films of polytetrafluoroethylene," Appl. Surf. Sci. 221, 99-109 (2004). [CrossRef]
- B. N. Chichkoh, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, "Femtosecond, picosecondand nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, K. Toyoda, "Effect of pulse duration on ablation characteristics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys. 35, 101-106 (1996). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- B. N. Chichkoh, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, "Femtosecond, picosecondand nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, K. Toyoda, "Effect of pulse duration on ablation characteristics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys. 35, 101-106 (1996). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
- K. P. Adhi, R. L. Owings, T. A. Railkar, W. D. Brown, A. P. Malshe, "Femtosecond ultraviolet (248nm) excimer laser processing of Teflon (PTFE)," Appl. Surf. Sci. 218, 17-23 (2003). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
- S. Preuss, M. Spath, Y. Zhang, M. Stuke, "Time resolved dynamics of subpicosecond laser ablation," Appl. Phys. Lett. 62, 3049-3051 (1993). [CrossRef]
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- K. P. Adhi, R. L. Owings, T. A. Railkar, W. D. Brown, A. P. Malshe, "Femtosecond ultraviolet (248nm) excimer laser processing of Teflon (PTFE)," Appl. Surf. Sci. 218, 17-23 (2003). [CrossRef]
- S. B. Dake, N. R. Rajopadhye, S. V. Bhoraskar, "Evaluation and characterization of chemically modified polymers as secondary electron emitters," J. Phys. D: Appl. Phys. 20, 1631-1636 (1987). [CrossRef]
- M. Rauh, J. Ihlemann, A. Koch, "Laser surface roughening of PTFE for increased bonding strength," Appl. Phys. A 88, 231-233 (2007). [CrossRef]
- T. Gumpenberger, J. Heitz, D. Bäuerle, T. C. Rosenmayer "Modification of expanded polytetrafluoroethylene by UV irradiation in reactive and inert atmosphere," Appl. Phys. A 80, 27-33 (2005). [CrossRef]
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- T. Seideman, M. Yu. Ivanov, P. B. Corkum, "Role of electron localization in intense-field molecular ionization," Phys. Rev. Lett. 75, 2819-2822 (1995). [CrossRef] [PubMed]
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- A. A. Serafetinides, M. I. Makropoulou, C. D. Skordoulis, A. K. Kar, "Ultra-short pulsed laser ablation of polymers," Appl. Surf. Sci. 180, 42-56 (2001). [CrossRef]
- Yu. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, Y. Izawa, "Ablation and amorphization of crystalline Si by femtosecond and picosecond laser irradiation," Jpn. J. Appl. Phys. 45, 5791-5794 (2006). [CrossRef]
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
- A. A. Serafetinides, M. I. Makropoulou, C. D. Skordoulis, A. K. Kar, "Ultra-short pulsed laser ablation of polymers," Appl. Surf. Sci. 180, 42-56 (2001). [CrossRef]
- S. Preuss, M. Spath, Y. Zhang, M. Stuke, "Time resolved dynamics of subpicosecond laser ablation," Appl. Phys. Lett. 62, 3049-3051 (1993). [CrossRef]
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- E. Constant, H. Stapelfeldt, P. B. Corkum, "Observation of enhanced ionization of molecular ions in intense laser fields," Phys. Rev. Lett. 76, 4140-4143 (1996). [CrossRef] [PubMed]
- S. Preuss, M. Spath, Y. Zhang, M. Stuke, "Time resolved dynamics of subpicosecond laser ablation," Appl. Phys. Lett. 62, 3049-3051 (1993). [CrossRef]
- S. Kuper and M. Stuke, "Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses," Appl. Phys. Lett. 54, 4-6 (1989). [CrossRef]
- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
- S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, K. Toyoda, "Effect of pulse duration on ablation characteristics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys. 35, 101-106 (1996). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
- J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, E.W. Kreutz, "Picosecond laser ablation of thin copper films," Appl. Phys. A 63, 117-121 (1996). [CrossRef]
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- B. N. Chichkoh, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, "Femtosecond, picosecondand nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
- J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, E.W. Kreutz, "Picosecond laser ablation of thin copper films," Appl. Phys. A 63, 117-121 (1996). [CrossRef]
- M. Womack, M. Vendan and P. Molian, "Femtosecond pulsed laser ablation and deposition of thin films of polytetrafluoroethylene," Appl. Surf. Sci. 221, 99-109 (2004). [CrossRef]
- B. N. Chichkoh, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, "Femtosecond, picosecondand nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- J. P. Jog, S. J. Walzade, S. V. Bhoraskar, "Study of localized states in FEP by space-charge limited current measurements," Polymer 23, 1622-1626 (1982). [CrossRef]
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
- M. Womack, M. Vendan and P. Molian, "Femtosecond pulsed laser ablation and deposition of thin films of polytetrafluoroethylene," Appl. Surf. Sci. 221, 99-109 (2004). [CrossRef]
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
- S. Preuss, M. Spath, Y. Zhang, M. Stuke, "Time resolved dynamics of subpicosecond laser ablation," Appl. Phys. Lett. 62, 3049-3051 (1993). [CrossRef]
Appl. Phys. A
- T. Gumpenberger, J. Heitz, D. Bäuerle, T. C. Rosenmayer "Modification of expanded polytetrafluoroethylene by UV irradiation in reactive and inert atmosphere," Appl. Phys. A 80, 27-33 (2005). [CrossRef]
- M. Rauh, J. Ihlemann, A. Koch, "Laser surface roughening of PTFE for increased bonding strength," Appl. Phys. A 88, 231-233 (2007). [CrossRef]
- B. N. Chichkoh, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, "Femtosecond, picosecondand nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
- J. Jandeleit, G. Urbasch, H. D. Hoffmann, H. G. Treusch, E.W. Kreutz, "Picosecond laser ablation of thin copper films," Appl. Phys. A 63, 117-121 (1996). [CrossRef]
Appl. Phys. Lett.
- S. Preuss, M. Spath, Y. Zhang, M. Stuke, "Time resolved dynamics of subpicosecond laser ablation," Appl. Phys. Lett. 62, 3049-3051 (1993). [CrossRef]
- S. Kuper and M. Stuke, "Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses," Appl. Phys. Lett. 54, 4-6 (1989). [CrossRef]
- H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798nm," Appl. Phys. Lett. 65, 1850-1852(1994). [CrossRef]
Appl. Surf. Sci.
- K. P. Adhi, R. L. Owings, T. A. Railkar, W. D. Brown, A. P. Malshe, "Femtosecond ultraviolet (248nm) excimer laser processing of Teflon (PTFE)," Appl. Surf. Sci. 218, 17-23 (2003). [CrossRef]
- M. Womack, M. Vendan and P. Molian, "Femtosecond pulsed laser ablation and deposition of thin films of polytetrafluoroethylene," Appl. Surf. Sci. 221, 99-109 (2004). [CrossRef]
- M. Hashida, A. F. Semerok, O. Gobert, G. Petite, Y. Izawa, J. F. Wagner, "Ablation threshold dependence on pulse duration for copper," Appl. Surf. Sci. 197-198, 862-867 (2002). [CrossRef]
- S. Guizard, A. Semerok, J. Gaudin, M. Hashida, P. Martin, F. Quere, "Femtosecond laser ablation of transparent dielectrics: measurement and modelisation of crater profiles," Appl. Surf. Sci. 186, 364-368 (2002). [CrossRef]
- A. A. Serafetinides, M. I. Makropoulou, C. D. Skordoulis, A. K. Kar, "Ultra-short pulsed laser ablation of polymers," Appl. Surf. Sci. 180, 42-56 (2001). [CrossRef]
- T. Katoh, D. Yamaguchi, Y. Ikeda, Y. Aoki, M. Washio, Y. Tabata,"Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching," Appl. Surf. Sci. 186, 24-28 (2002). [CrossRef]
Chem. Rev.
- T. Lippert and J. T. Dickinson, "Chemical and spectroscopic aspects of polymer ablation: Special features and novel directions," Chem. Rev. 103, 453-485 (2003). [CrossRef] [PubMed]
J. Appl. Phys.
- Z. B. Wang, M. H. Hong, Y. F. Lu, D. J. Wu, B. Lan, T. C. Chong, "Femtosecond laser ablation of polytetrafluoroethylene (Teflon) in ambient air," J. Appl. Phys. 93, 6375-6380 (2003). [CrossRef]
J. Phys. B: At. Mol. Opt. Phys.
- J. H. Posthumus, J. Plumridge, M. K. Thomas, K. Codling, L. J. Frasinski, A. J. Langley, P. F. Taday, "Dynamic and geometric laser-induced alignment of molecules in intense laser fields," J. Phys. B: At. Mol. Opt. Phys. 31, L553-L562 (1998). [CrossRef]
J. Phys. D: Appl. Phys.
- S. B. Dake, N. R. Rajopadhye, S. V. Bhoraskar, "Evaluation and characterization of chemically modified polymers as secondary electron emitters," J. Phys. D: Appl. Phys. 20, 1631-1636 (1987). [CrossRef]
Jpn. J. Appl. Phys.
- S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, K. Toyoda, "Effect of pulse duration on ablation characteristics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys. 35, 101-106 (1996). [CrossRef]
- Yu. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, Y. Izawa, "Ablation and amorphization of crystalline Si by femtosecond and picosecond laser irradiation," Jpn. J. Appl. Phys. 45, 5791-5794 (2006). [CrossRef]
Phys. Rev. A
- S. Sakabe, S. Shimizu, M. Hashida, F. Sato, T. Tsuyukushi, K. Nishihara, S. Okihara, T. Kagawa, Y. Izawa, K. Imasaki, T. Iida, "Generation of high-energy protons from the Coulomb explosion of hydrogen clusters by intense femtosecond laser pulses," Phys. Rev. A 69, 023203 (2004). [CrossRef]
- M. Hirokane, S. Shimizu, M. Hashida, S. Okada, S. Okihara, F. Sato, T. Iida, S. Sakabe, "Energy distributions of ions emitted from argon clusters Coulomb-exploded by intense femtosecond laser pulses," Phys. Rev. A 69, 063201 (2004). [CrossRef]
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
Phys. Rev. E
- S. Okihara, T. Z. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida, K. Nishihara, T. Norimatsu, "Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses," Phys. Rev. E 69, 026401 (2004). [CrossRef]
Phys. Rev. Lett.
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, F. Krausz, "Femtosecond optical breakdown in dielectrics," Phys. Rev. Lett. 80, 4076-4079 (1998). [CrossRef]
- E. Constant, H. Stapelfeldt, P. B. Corkum, "Observation of enhanced ionization of molecular ions in intense laser fields," Phys. Rev. Lett. 76, 4140-4143 (1996). [CrossRef] [PubMed]
- T. Seideman, M. Yu. Ivanov, P. B. Corkum, "Role of electron localization in intense-field molecular ionization," Phys. Rev. Lett. 75, 2819-2822 (1995). [CrossRef] [PubMed]
Plasma Process Polym.
- T. Lippert, "Interaction of photons with polymers: From surface modification to ablation," Plasma Process Polym. 2, 525-546 (2005). [CrossRef]
Polymer
- J. P. Jog, S. J. Walzade, S. V. Bhoraskar, "Study of localized states in FEP by space-charge limited current measurements," Polymer 23, 1622-1626 (1982). [CrossRef]
SEI Tech. Rev.
- Y. Masuda, F. Hayashi, T. Fujita, M. Uenoyama, Y. Idomoto, Y. Okuda, "Development of anisotropic conductive film for semiconductor chip testing," SEI Tech. Rev. 166, 24-27 (2005).
Other
- S. Oga, "Fabrication of porouspolytetrafluoroethylene," Jpn. Patent No.S42-13560(67/13560), Aug.(1967).
- The Chemical Society of Japan, 5thKagakubinranII (Maruzen,2004), Chap.16.1.
2007, Rauh, Appl. Phys. A
- M. Rauh, J. Ihlemann, A. Koch, "Laser surface roughening of PTFE for increased bonding strength," Appl. Phys. A 88, 231-233 (2007). [CrossRef]
- Yu. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, Y. Izawa, "Ablation and amorphization of crystalline Si by femtosecond and picosecond laser irradiation," Jpn. J. Appl. Phys. 45, 5791-5794 (2006). [CrossRef]
- S. Sakabe, K. Shirai, M. Hashida, S. Shimizu, S. Masuno, "Skinning of argon clusters by Coulomb explosion induced with an intense femtosecond laser pulse," Phys. Rev. A 74, 043205 (2006). [CrossRef]
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