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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 15 — Jul. 20, 2009
  • pp: 13187–13192

The second order diffraction efficiency measurements in the vacuum ultraviolet

Yi Qu, Shurong Wang, Zhenduo Zhang, and Futian Li  »View Author Affiliations

Optics Express, Vol. 17, Issue 15, pp. 13187-13192 (2009)

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A simple method for measuring the second order diffraction efficiency in the vacuum ultraviolet (VUV) is described. Spectral reflectance of a mirror will be influenced by the second diffraction order, measured in a spectrophotometer system without filters. The second order diffraction efficiency can be calculated from the different spectral reflectance values. A deuterium lamp and a scintillated photomultiplier are used in the measurement system. The second order diffraction efficiency can be determined from 120nm to 165nm. The result of 0.00579±11.9% is obtained at 161nm.

© 2009 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1940) Diffraction and gratings : Diffraction
(260.7210) Physical optics : Ultraviolet, vacuum

ToC Category:
Diffraction and Gratings

Original Manuscript: May 11, 2009
Revised Manuscript: June 25, 2009
Manuscript Accepted: July 3, 2009
Published: July 17, 2009

Yi Qu, Shurong Wang, Zhenduo Zhang, and Futian Li, "The second order diffraction efficiency measurements in the vacuum ultraviolet," Opt. Express 17, 13187-13192 (2009)

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Fig.1. Fig. 2. Fig.3 .

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