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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 17 — Aug. 17, 2009
  • pp: 14543–14551

High Quality Planar Silicon Nitride Microdisk Resonators for Integrated Photonics in the VisibleWavelength Range

Ehsan Shah Hosseini, Siva Yegnanarayanan, Amir Hossein Atabaki, Mohammad Soltani, and Ali Adibi  »View Author Affiliations

Optics Express, Vol. 17, Issue 17, pp. 14543-14551 (2009)

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High quality factor (Q≈3.4×106) microdisk resonators are demonstrated in a Si3N4 on SiO2 platform at 652–660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling.

© 2009 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: June 15, 2009
Revised Manuscript: July 23, 2009
Manuscript Accepted: July 23, 2009
Published: August 3, 2009

Ehsan Shah Hosseini, Siva Yegnanarayanan, Amir H. Atabaki, Mohammad Soltani, and Ali Adibi, "High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range," Opt. Express 17, 14543-14551 (2009)

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