OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 17 — Aug. 17, 2009
  • pp: 14627–14633

Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides

Jie Teng, Pieter Dumon, Wim Bogaerts, Hongbo Zhang, Xigao Jian, Xiuyou Han, Mingshan Zhao, Geert Morthier, and Roel Baets  »View Author Affiliations

Optics Express, Vol. 17, Issue 17, pp. 14627-14633 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (744 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220nm-height SOI waveguides is found to be around 350nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/°C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15µm) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50dB/cm after overlaying a polymer cladding.

© 2009 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

Original Manuscript: April 23, 2009
Revised Manuscript: June 4, 2009
Manuscript Accepted: June 9, 2009
Published: August 4, 2009

Jie Teng, Pieter Dumon, Wim Bogaerts, Hongbo Zhang, Xigao Jian, Xiuyou Han, Mingshan Zhao, Geert Morthier, and Roel Baets, "Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides," Opt. Express 17, 14627-14633 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. Maru and Y. Abe, "Low-loss, flat-passband and athermal arrayed-waveguide grating multi/demultiplexer," Opt. Express 15, 18351-18356 (2007). [CrossRef] [PubMed]
  2. Y. Kokubun, S. Yoneda, and S. Matsuura, "Temperature-independent optical filter at 1.55 mu m wavelength using a silica-based athermal waveguide," Electron. Lett 34, 367-369 (1998). [CrossRef]
  3. H. Tanobe, Y. Kondo, Y. Kadota, K. Okamoto, and Y. Yoshikuni, "Temperature insensitive arrayed waveguide gratings on InP substrates," IEEE Photon. Technol. Lett. 10, 235-237 (1998). [CrossRef]
  4. K. Eun-Seok, K. Woo-Soo, K. Duk-Jun, and B. Byeong-Soo, "Reducing the thermal dependence of silica-based arrayed-waveguide grating using inorganic-organic hybrid materials," IEEE Photon. Technol. Lett. 16, 2625-2627 (2004). [CrossRef]
  5. J. M. Lee, D. J. Kim, H. Ahn, S. H. Park, and G. Kim, "Temperature dependence of silicon nanophotonic ring resonator with a polymeric overlayer," J. Lightwave Technol. 25, 2236-2243 (2007). [CrossRef]
  6. J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, "Controlling temperature dependence of silicon waveguide using slot structure," Opt. Express 16, 1645-1652 (2008). [CrossRef] [PubMed]
  7. W. N. Ye, R. Sun, J. Michel, L. Eldada, D. Pant, and L. C. Kimerling, "Thermo-optical Compensation in High-index-contrast Waveguides," 2008 5th Ieee International Conference on Group Iv Photonics, 401-403 (2008). [CrossRef]
  8. L. Zhou, K. Kashiwagi, K. Okamoto, R. P. Scott, N. K. Fontaine, D. Ding, V. Akella, and S. J. B. Yoo, "Towards athermal optically-interconnected computing system using slotted silicon microring resonators and RF-photonic comb generation " Appl. Phys. A 95, 1101-1109 (2009). [CrossRef]
  9. M. Uenuma and T. Moooka, "Temperature-independent silicon waveguide optical filter," Opt. Lett. 34, 599-601 (2009). [CrossRef] [PubMed]
  10. Y. Kokubun, N. Funato, and M. Takizawa, "Athermal Wave-Guides for Temperature-Independent Lightwave Devices," IEEE Photon. Technol. Lett. 5, 1297-1300 (1993). [CrossRef]
  11. Y. Kokubun, S. Yoneda, and H. Tanaka, "Temperature-independent narrowband optical filter at 1.31 mu m wavelength by an athermal waveguide," Electron. Lett. 32, 1998-2000 (1996). [CrossRef]
  12. M. W. Pruessner, T. H. Stievater, M. S. Ferraro, and W. S. Rabinovich, "Thermo-optic tuning and switching in SOI waveguide Fabry-Perot microcavities," Opt. Express 15, 7557-7563 (2007). [CrossRef] [PubMed]
  13. I. Kiyat, A. Aydinli, and N. Dagli, "Low-power thermooptical tuning of SOI resonator switch," IEEE Photon. Technol. Lett. 18, 364-366 (2006). [CrossRef]
  14. H. B. Zhang, J. Y. Wang, L. K. Li, Y. Song, M. S. Zhao, and X. G. Jian, "Synthesis of liquid polysilisiquioxane resins and properties of cured films," Thin Solid Films 517, 857-862 (2008). [CrossRef]
  15. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, and D. Van Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightwave Technol. 23, 401-412 (2005). [CrossRef]
  16. W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, and S. Beckx, "Basic structures for photonic integrated circuits in silicon-on-insulator," Opt. Express 12(2004). [CrossRef] [PubMed]
  17. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman, and R. Baets, "Grating couplers for coupling between optical fibers and nanophotonic waveguides," Jpn.J.Appl.Phys. Part 1-Regular Papers Brief Communications & Review Papers 45, 6071-6077 (2006).
  18. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004). [CrossRef]
  19. S. K. Selvaraja, P. Jaenen, S. Beckx, W. Bogaert, P. Dumon, D. Van Thourout, and R. Bates, "Silicon nanophotonic wire structures fabricated by 193nm optical lithography," 2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2, 48-49 (2007). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited