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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 17 — Aug. 17, 2009
  • pp: 14722–14728

Monitoring and dynamic control of distance and tilt angle measurements in micro-alignment instrument using an imaging approach

C. C. Jeng, C. H. Wu, C. Z. Li, and J. H. Chen  »View Author Affiliations

Optics Express, Vol. 17, Issue 17, pp. 14722-14728 (2009)

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An accurate and simple optical triangulation method is proposed for determining the distance and the tilt angle between the window and the SQUID sensor in a scanning SQUID microscope (SSM) system. The surface of window near the sensor plane is roughened with Alumina powder so that the incident and reflected traces of the laser beam passing the window surface become visible and can be measured precisely with a normal optical microscope. Using the proposed approach, the distance between the sensor and the sample can be reproducibly adjusted to 30 μm or less. This method can also be applied to photolithography apparatus to detect the relative positions of the mask and the wafer.

© 2009 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2830) Instrumentation, measurement, and metrology : Height measurements

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 19, 2009
Revised Manuscript: July 23, 2009
Manuscript Accepted: July 23, 2009
Published: August 5, 2009

C. C. Jeng, C. H. Wu, C. Z. Li, and J. H. Chen, "Monitoring and dynamic control of distance and tilt angle measurements in micro-alignment instrument using an imaging approach," Opt. Express 17, 14722-14728 (2009)

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