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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 17 — Aug. 17, 2009
  • pp: 15308–15317

Optical transmission and laser structuring of silicon membranes

Saulius Juodkazis, Yasufumi Nishi, Hiroaki Misawa, Vygantas Mizeikis, Olivier Schecker, Reimar Waitz, Paul Leiderer, and Elke Scheer  »View Author Affiliations

Optics Express, Vol. 17, Issue 17, pp. 15308-15317 (2009)

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The optical linear and nonlinear properties of ~340-nm-thick Si membranes were investigated. The investigation included both experiments in which the reflection and transmission from the membranes were measured, and finite differences time domain simulations. The linear optical transmission of the Si membranes can be controlled by changing the thickness of a thermally grown oxide on the membrane. Illumination of the membranes with high levels of irradiation leads to optical modifications that are consistent with the formation of amorphous silicon and dielectric breakdown. When irradiated under conditions where dielectric breakdown occurs, the membranes can be ablated in a well-controlled manner. Laser micro-structuring of the membranes by ablation was carried out to make micrometer-sized holes by focused fs-pulses. Ns-pulses were also used to fabricate arrays of holes by proximity-ablation of a closely-packed pattern of colloidal particles.

© 2009 Optical Society of America

OCIS Codes
(190.5970) Nonlinear optics : Semiconductor nonlinear optics including MQW
(350.3850) Other areas of optics : Materials processing
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Nonlinear Optics

Original Manuscript: May 21, 2009
Revised Manuscript: July 10, 2009
Manuscript Accepted: August 13, 2009
Published: August 14, 2009

Saulius Juodkazis, Yasufumi Nishi, Hiroaki Misawa, Vygantas Mizeikis, Olivier Schecker, Reimar Waitz, Paul Leiderer, and Elke Scheer, "Optical transmission and laser structuring of silicon membranes," Opt. Express 17, 15308-15317 (2009)

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