OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 19 — Sep. 14, 2009
  • pp: 16613–16618

Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber

Wenhui Wang, Nan Wu, Ye Tian, Xingwei Wang, Christopher Niezrecki, and Julie Chen  »View Author Affiliations

Optics Express, Vol. 17, Issue 19, pp. 16613-16618 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (194 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



This paper presents a novel Fabry-Perot (FP) optical fiber pressure/acoustic sensor. It consists of two V-shaped grooves having different sized widths, a diaphragm on the surface of the larger V-groove, and a 45° angle-polished fiber. The precision of FP cavity length is determined by the fabrication process of photolithography and anisotropic etching of a silicon crystal. Therefore, the cavity length can be controlled on the order of ten nm. Sensors were fabricated and tested. Test results indicate that the sensors’ cavity lengths have been controlled precisely. The packaged sensor has demonstrated very good static and dynamic responses compared to a commercially available pressure sensor and a microphone.

© 2009 OSA

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 7, 2009
Revised Manuscript: August 16, 2009
Manuscript Accepted: August 24, 2009
Published: September 2, 2009

Wenhui Wang, Nan Wu, Ye Tian, Xingwei Wang, Christopher Niezrecki, and Julie Chen, "Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber," Opt. Express 17, 16613-16618 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. Zhou and L. M. Sim, “Damage detection and assessment in fibre-reinforced composite structures with embedded fibre optic sensors,” Smart Mater. Struct. 11(6), 925–939 (2002). [CrossRef]
  2. T. Rice, R. Duncan, D. Gifford, and B. Childers, “Fiber optic distributed strain, acoustic emission, and moisture detection sensors for health maintenance,” in IEEE Systems Readiness Technology Conference(2003), pp. 505–514.
  3. X. Wang, B. Li, Z. Xiao, S. H. Lee, H. Roman, O. L. Russo, K. K. Chin, and K. R. Farmer, “An ultra-sensitive optical MEMS sensor for partial discharge detection,” J. Micromech. Microeng. 15(3), 521–527 (2005). [CrossRef]
  4. J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005). [CrossRef]
  5. K. K. Chin, Y. Sun, G. Feng, G. E. Georgiou, K. Guo, E. Niver, H. Roman, and K. Noe, “Fabry-Perot diaphragm fiber-optic sensor,” Appl. Opt. 46(31), 7614–7619 (2007). [CrossRef] [PubMed]
  6. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001). [CrossRef]
  7. X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett. 31(7), 885–887 (2006). [CrossRef] [PubMed]
  8. Z. Yizheng, K. L. Cooper, G. R. Pickrell, and W. Anbo, “High-temperature fiber-tip pressure sensor,” J. Lightwave Technol. 24(2), 861–869 (2006). [CrossRef]
  9. E. Cibula and D. Donlagić, “Miniature fiber-optic pressure sensor with a polymer diaphragm,” Appl. Opt. 44(14), 2736–2744 (2005). [CrossRef] [PubMed]
  10. E. Cibula, S. Pevec, B. Lenardic, E. Pinet, and D. Donlagic, “Miniature all-glass robust pressure sensor,” Opt. Express 17(7), 5098–5106 (2009). [CrossRef] [PubMed]
  11. E. Cibula and D. Donlagic, “In-line short cavity Fabry-Perot strain sensor for quasi distributed measurement utilizing standard OTDR,” Opt. Express 15(14), 8719–8730 (2007). [CrossRef] [PubMed]
  12. D. Donlagic and E. Cibula, “All-fiber high-sensitivity pressure sensor with SiO2 diaphragm,” Opt. Lett. 30(16), 2071–2073 (2005). [CrossRef] [PubMed]
  13. M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J. 3(1), 102–107 (2003). [CrossRef]
  14. R. A. Wolthuis, G. L. Mitchell, E. Saaski, J. C. Hartl, and M. A. Afromowitz, “Development of medical pressure and temperature sensors employing optical spectrum modulation,” IEEE Trans. Biomed. Eng. 38(10), 974–981 (1991). [CrossRef] [PubMed]
  15. K. Hsieh, and E. Smela, “Micromachined optical fiber based Fabry-Perot pressure sensor,” presented at MEMS Alliance Symposium, Laurel, MD, 18–19 Apr. 2005.
  16. E. Pinet, A. Pham, and S. Rioux, “Miniature fiber optic pressure sensor for medical applications: an opportunity for intra-aortic balloon pumping (IABP) therapy,” Proc. SPIE 5855, 234–237 (2005). [CrossRef]
  17. A. J. Nijdam, J. G. E. Gardeniers, C. Gui, and M. Elwenspoek, “Etching pits and dislocations in Si {111},” Sens. Actuators A Phys. 86(3), 238–247 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited