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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 19 — Sep. 14, 2009
  • pp: 16613–16618

Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber

Wenhui Wang, Nan Wu, Ye Tian, Xingwei Wang, Christopher Niezrecki, and Julie Chen  »View Author Affiliations


Optics Express, Vol. 17, Issue 19, pp. 16613-16618 (2009)
http://dx.doi.org/10.1364/OE.17.016613


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Abstract

This paper presents a novel Fabry-Perot (FP) optical fiber pressure/acoustic sensor. It consists of two V-shaped grooves having different sized widths, a diaphragm on the surface of the larger V-groove, and a 45° angle-polished fiber. The precision of FP cavity length is determined by the fabrication process of photolithography and anisotropic etching of a silicon crystal. Therefore, the cavity length can be controlled on the order of ten nm. Sensors were fabricated and tested. Test results indicate that the sensors’ cavity lengths have been controlled precisely. The packaged sensor has demonstrated very good static and dynamic responses compared to a commercially available pressure sensor and a microphone.

© 2009 OSA

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: July 7, 2009
Revised Manuscript: August 16, 2009
Manuscript Accepted: August 24, 2009
Published: September 2, 2009

Citation
Wenhui Wang, Nan Wu, Ye Tian, Xingwei Wang, Christopher Niezrecki, and Julie Chen, "Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber," Opt. Express 17, 16613-16618 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-19-16613


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