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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 19 — Sep. 14, 2009
  • pp: 16861–16868

Phase-shifts nπ/2 calibration method for phase-stepping interferometry

Fuzhong Bai and Changhui Rao  »View Author Affiliations

Optics Express, Vol. 17, Issue 19, pp. 16861-16868 (2009)

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A novel phase-shifts nπ/2 calibration method for phase-stepping interferometry, in which the sum intensities and the squared sum of a series of phase-shifted interferograms are firstly calculated, and then by the minimization of the variances of these sums perform the nπ/2 phase-shifts calibration, is proposed in this paper. The proposed method can overcome effectively the effect of the variations of background and modulation intensities in interferograms with any phase structure, and it is also insensitive to the nonlinearity of phase shifter. Numerical simulation and experiments are implemented to verify the effectiveness of this method.

© 2009 OSA

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 22, 2009
Revised Manuscript: August 24, 2009
Manuscript Accepted: August 25, 2009
Published: September 8, 2009

Fuzhong Bai and Changhui Rao, "Phase-shifts nπ/2 calibration method for phase-stepping interferometry," Opt. Express 17, 16861-16868 (2009)

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