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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 20 — Sep. 28, 2009
  • pp: 17669–17677

Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

Weilun Chao, Jihoon Kim, Senajith Rekawa, Peter Fischer, and Erik H. Anderson  »View Author Affiliations

Optics Express, Vol. 17, Issue 20, pp. 17669-17677 (2009)

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To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond.

© 2009 OSA

OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(340.7440) X-ray optics : X-ray imaging
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(340.1365) X-ray optics : Bending magnet radiation
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
X-ray Optics

Original Manuscript: June 4, 2009
Revised Manuscript: July 13, 2009
Manuscript Accepted: July 19, 2009
Published: September 18, 2009

Virtual Issues
Vol. 4, Iss. 11 Virtual Journal for Biomedical Optics

Weilun Chao, Jihoon Kim, Senajith Rekawa, Peter Fischer, and Erik H. Anderson, "Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy," Opt. Express 17, 17669-17677 (2009)

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