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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 20 — Sep. 28, 2009
  • pp: 18219–18228

Ellipsometric retrieval of the phenomenological parameters of a waveguide grating

David Pietroy, Olivier Parriaux, and Jean-Louis Stehle  »View Author Affiliations

Optics Express, Vol. 17, Issue 20, pp. 18219-18228 (2009)

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Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-section of a singlemode grating waveguide biosensor chip cut by FIB and analyzed by SEM.

© 2009 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(130.2790) Integrated optics : Guided waves
(230.7400) Optical devices : Waveguides, slab
(260.5740) Physical optics : Resonance

ToC Category:
Diffraction and Gratings

Original Manuscript: June 12, 2009
Revised Manuscript: July 24, 2009
Manuscript Accepted: July 25, 2009
Published: September 25, 2009

Virtual Issues
Vol. 4, Iss. 11 Virtual Journal for Biomedical Optics

David Pietroy, Olivier Parriaux, and Jean-Louis Stehle, "Ellipsometric retrieval of the phenomenological parameters of a waveguide grating," Opt. Express 17, 18219-18228 (2009)

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