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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 21 — Oct. 12, 2009
  • pp: 18394–18407

Large-area and high-resolution distortion measurement based on moiré fringe method for hot embossing process

Zhiguang Xu, Hayden K. Taylor, Duane S. Boning, Soon Fatt Yoon, and Kamal Youcef-Toumi  »View Author Affiliations

Optics Express, Vol. 17, Issue 21, pp. 18394-18407 (2009)

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A moiré fringe approach is developed to identify simultaneously the global and local distortions in hot-embossed polymeric samples. A square grid pattern with a pitch of 63.5 μm is hot-embossed on the polymer substrate. When a reference grid, a polymeric film with the same pattern, is placed on top of the sample, a moiré fringe pattern is observed and recorded by a document scanner. The deviation of the intersections of the fringes from their ideal positions presents the residual distortion in the sample. With different sample-reference rotation angles eight images are acquired for the same sample to achieve the optimal result by a data fitting technique. The validity of this method is proved by the self-consistency of the results from the eight images. To the best of our knowledge, this is the first time distortion quantification has been achieved both in a large area up to that of a scanner and with a high resolution at the level of 1 μm. Furthermore, we do not use any expensive instrument, nor need to measure the sample–reference rotation angle or position the sample precisely, and the process is run automatically by a computer instead of manual operation.

© 2009 OSA

OCIS Codes
(100.0100) Image processing : Image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 22, 2009
Revised Manuscript: July 24, 2009
Manuscript Accepted: July 25, 2009
Published: September 28, 2009

Zhiguang Xu, Hayden K. Taylor, Duane S. Boning, Soon Fatt Yoon, and Kamal Youcef-Toumi, "Large-area and high-resolution distortion measurement based on moiré fringe method for hot embossing process," Opt. Express 17, 18394-18407 (2009)

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