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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 21 — Oct. 12, 2009
  • pp: 18518–18524

Tunable Bragg reflectors on silicon-on-insulator rib waveguides

Ivano Giuntoni, Andrzej Gajda, Michael Krause, Ralf Steingrüber, Jürgen Bruns, and Klaus Petermann  »View Author Affiliations

Optics Express, Vol. 17, Issue 21, pp. 18518-18524 (2009)

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We present the design, fabrication and characterization of Bragg reflectors on silicon-on-insulator rib waveguides. The fabrication is based on a new double lithographic process, combining electron-beam lithography for the grating and photolithography for the waveguides. This process allows the realization of low loss reflectors, which were fully characterized. The influence of the etching depth and of the waveguide geometry on the reflector performance is considered. We demonstrate a reflectivity larger than 80% over a bandwidth of 0.8 nm with an insertion loss of only 0.5 dB. A thermal tunability of the device is also considered, showing that a shift of the reflected wavelength of 77 pm/K is possible.

© 2009 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.1480) Optical devices : Bragg reflectors

ToC Category:
Integrated Optics

Original Manuscript: July 22, 2009
Revised Manuscript: September 18, 2009
Manuscript Accepted: September 22, 2009
Published: September 29, 2009

Ivano Giuntoni, Andrzej Gajda, Michael Krause, Ralf Steingrüber, Jürgen Bruns, and Klaus Petermann, "Tunable Bragg reflectors on silicon-on-insulator rib waveguides," Opt. Express 17, 18518-18524 (2009)

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  1. M. P. Bulk, A. P. Knights, P. E. Jessop, R. Loiacono, G. Z. Mashanovich, G. T. Reed, and R. M. Williams, “Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides,” Adv. Opt. Technol. 2008, 276165 (2008).
  2. S. Homampour, M. P. Bulk, P. E. Jessop, and A. P. Knights, “Thermal tuning of planar Bragg gratings in silicon-on-insulator rib waveguides,” Phys. Status Solidi C 6, S240–S243 (2009). [CrossRef]
  3. J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20(6), 2753–2757 (2002). [CrossRef]
  4. D. Wiesmann, C. David, R. Germann, D. Emi, and G. L. Bona,“Apodized Surface-Corrugated Gratings With Varying Duty Cycles,” IEEE Photon. Technol. Lett. 12(6), 639–641 (2000). [CrossRef]
  5. S. P. Chan, V. M. N. Passaro, G. Z. Mashanovich, G. Ensell, and G. T. Reed, “Third order Bragg grating filters in small SOI waveguides,” J. Europ. Opt. Soc.-Rapid Publications 2, 07029 (2007). [CrossRef]
  6. D. J. Moss, V. G. Ta’eed, B. J. Eggleton, D. Freeman, S. Madden, M. Samoc, B. Luther-Davies, S. Janz, and D.-X. Xu, “Bragg gratings in silicon-on-insulator waveguides by focused ion-beam milling,” Appl. Phys. Lett. 85(21), 4860–4862 (2004). [CrossRef]
  7. P. Heimala, T. Aalto, S. Yliniemi, J. Simonen, M. Kuittinen, J. Turunen, and M. Leppihalme, “Fabrication of Bragg Grating Structures in Silicon,” Phys. Scr. T101(1), 92–95 (2002). [CrossRef]
  8. T. E. Murphy, J. T. Hastings, and H. I. Smith, “Fabrication and characterization of narrowband Bragg reflection filters in silicon-on-insulator ridge waveguides,” J. Lightwave Technol. 19(12), 1938–1942 (2001). [CrossRef]
  9. S. Honda, Z. Wu, J. Matsui, K. Utaka, T. Edura, M. Tokuda, K. Tsutsui, and Y. Wada, “Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE,” Electron. Lett. 43(11), 630–631 (2007). [CrossRef]
  10. J. Čtyroký, S. Helfert, R. Pregla, P. Bienstman, R. Baets, R. Ridder, R. Stoffer, G. Klaasse, J. PetráČek, P. Lalanne, J. P. Hugonin, and R. M. LaRue,“Bragg waveguide grating as a 1D photonic band gap structure: COST 268 modelling task,” Opt. Quantum Electron. 34(5-6), 455–470 (2002). [CrossRef]
  11. I. Giuntoni, M. Krause, H. Renner, J. Bruns, A. Gajda, E. Brinkmeyer, and K. Petermann, “Numerical Survey on Bragg Reflectors in Silicon-on-Insulator Waveguides,” in 2008 5th Int. Conf. on Group IV Photonics (IEEE/LEOS 2008), pp. 285–287.
  12. J. Tidmarsh, and J. Drake, “Silicon-on-Insulator Waveguide Bragg Gratings,” in Integrated Photonics Research, Vol. 4 of OSA Technical Digest (Optical Society of America, 1998), paper ITuH4.
  13. G. Cocorullo, F. G. Della Corte, and I. Rendina, “Temperature dependence of the thermo-optic coefficient in crystalline silicon between room temperature and 550 K at the wavelength of 1523 nm,” Appl. Phys. Lett. 74(22), 3338–3340 (1999). [CrossRef]

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