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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 21 — Oct. 12, 2009
  • pp: 19213–19224

Dual-frequency heterodyne ellipsometer for characterizing generalized elliptically birefringent media

Chih-Jen Yu, Chu-En Lin, Ying-Chang Li, Li-Dek Chou, Jheng-Syong Wu, Cheng-Chung Lee, and Chien Chou  »View Author Affiliations


Optics Express, Vol. 17, Issue 21, pp. 19213-19224 (2009)
http://dx.doi.org/10.1364/OE.17.019213


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Abstract

This research proposed a dual-frequency heterodyne ellipsometer (DHE) in which a dual-frequency collinearly polarized laser beam with equal amplitude and zero phase difference between p- and s-polarizations is setup. It is based on the polarizer-sample-analyzer, PSA configuration of the conventional ellipsometer. DHE enables to characterize a generalized elliptical phase retarder by treating it as the combination of a linear phase retarder and a polarization rotator. The method for measuring elliptical birefringence of an elliptical phase retarder based on the equivalence theorem of an unitary optical system was derived and the experimental verification by use of DHE was demonstrated too. The experimental results show the capability of DHE on characterization of a generalized phase retardation plate accurately.

© 2009 OSA

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(260.1440) Physical optics : Birefringence

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 3, 2009
Revised Manuscript: October 1, 2009
Manuscript Accepted: October 1, 2009
Published: October 8, 2009

Citation
Chih-Jen Yu, Chu-En Lin, Ying-Chang Li, Li-Dek Chou, Jheng-Syong Wu, Cheng-Chung Lee, and Chien Chou, "Dual-frequency heterodyne ellipsometer for characterizing generalized elliptically birefringent media," Opt. Express 17, 19213-19224 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-21-19213


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