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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 22 — Oct. 26, 2009
  • pp: 19919–19925

A bi-stable 2x2 optical switch monolithically integrated with variable optical attenuators

Bo-Ting Liao, Hsin-Hong Shen, Hsin-Hung Liao, and Yao-Joe Yang  »View Author Affiliations

Optics Express, Vol. 17, Issue 22, pp. 19919-19925 (2009)

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This work presents the development of a novel micromachined 2x2 optical switch monolithically integrated with variable optical attenuators. The proposed device can be easily realized by a standard manufacturing process with single photo mask. The key to realizing this device by such a simple approach is the employment the split-cross-bar (SCB) configuration. With this configuration, the fabrication challenges and layout constraints for accommodating all the sub-components of this dual-function device can be completely eliminated. The monolithically-integrated system has four movable mirrors, two bi-stable mechanisms and six actuators. The switching of optical signals is achieved by moving the mirrors attached on the bi-stable mechanisms using four of the actuators. The attenuation of optical power is carried out by moving the mirrors using the other two actuators and the bi-stable mechanisms. Also, only simple in-plane motions are needed for these sub-components to achieve all the functionalities. In addition, the adaption of bi-stable mechanisms can reduce the power consumption and simplify the actuation scheme. The measured insertion losses for both channels are about 1.0~1.1 dB, and the cross-talk is less than −60 dB. The attenuation range is about 30 dB for a maximum applied voltage of 20 V. Also, the measured switching time is less than 4 ms.

© 2009 OSA

OCIS Codes
(060.2340) Fiber optics and optical communications : Fiber optics components
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Fiber Optics and Optical Communications

Original Manuscript: July 30, 2009
Revised Manuscript: October 11, 2009
Manuscript Accepted: October 14, 2009
Published: October 19, 2009

Bo-Ting Liao, Hsin-Hong Shen, Hsin-Hung Liao, and Yao-Joe Yang, "A bi-stable 2x2 optical switch monolithically integrated with variable optical attenuators," Opt. Express 17, 19919-19925 (2009)

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  1. W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. de Rooij, “Applications of SOI-based optical MEMS,” IEEE J. Sel. Top. Quantum Electron. 8(1), 148–154 (2002). [CrossRef]
  2. M. C. Wu, A. Solgaard, and J. E. Ford, “Optical MEMS for lightwave communication,” J. Lightwave Technol. 24(12), 4433–4454 (2006). [CrossRef]
  3. R. Guerre, C. Hibert, Y. Burri, P. Fluckiger, and P. Renaud, “Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications,” Sens. Actuators A Phys. 123–124, 570–583 (2005).
  4. W. Li, J. Q. Liang, Z. Z. Liang, X. Q. Li, W. B. Wang, Y. C. Zhong, and D. G. Sun, “Design and fabrication of a micro-optic switch,” Opt. Express 16(9), 6324–6330 (2008). [CrossRef] [PubMed]
  5. C. Marxer, C. Thio, M. A. Gretillat, N. F. deRooij, R. Battig, O. Anthamatten, B. Valk, and P. Vogel, “Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications,” J. Microelectromech. Syst. 6(3), 277–285 (1997). [CrossRef]
  6. A. Groisman, S. Zamek, K. Campbell, L. Pang, U. Levy, and Y. Fainman, “Optofluidic 1x4 switch,” Opt. Express 16(18), 13499–13508 (2008). [CrossRef] [PubMed]
  7. X. M. Zhang, Q. W. Zhao, A. Q. Liu, J. Zhang, J. H. Lau, and C. H. Kam, “Asymmetric tuning schemes of MEMS dual-shutter VOA,” J. Lightwave Technol. 26(5), 569–579 (2008). [CrossRef]
  8. S. H. Hung, H. T. Hsieh, and G. D. J. Su, “An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation,” J. Micromech. Microeng. 18(7), 075003 (2008). [CrossRef]
  9. K. Isamoto, K. Kato, A. Morosawa, C. H. Chong, H. Fujita, and H. Toshiyoshi, “A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining,” IEEE J. Sel. Top. Quantum Electron. 10(3), 570–578 (2004). [CrossRef]
  10. C. Marxer, P. Griss, and N. F. de Rooij, “A variable optical attenuator based on silicon micromechanics,” IEEE Photon. Technol. Lett. 11(2), 233–235 (1999). [CrossRef]
  11. C. R. Giles, V. Aksyuk, B. Barber, R. Ruel, L. Stulz, and D. Bishop, “A silicon MEMS optical switch attenuator and its use in lightwave subsystems,” IEEE J. Sel. Top. Quantum Electron. 5(1), 18–25 (1999). [CrossRef]
  12. Q. H. Chen, W. G. Wu, G. Z. Yan, Z. Q. Wang, and Y. L. Hao, “Novel multifunctional device for optical power splitting, switching, and attenuating,” IEEE Photon. Technol. Lett. 20(8), 632–634 (2008). [CrossRef]
  13. Y. J. Yang, B. T. Liao, and W. C. Kuo, “A novel 2x2 MEMS optical switch using the split cross-bar design,” J. Micromech. Microeng. 17(5), 875–882 (2007). [CrossRef]
  14. C. Lee, “A MEMS VOA using electrothermal actuators,” J. Lightwave Technol. 25(2), 490–498 (2007). [CrossRef]
  15. D. A. Horsley, W. O. Davis, K. J. Hogan, M. R. Hart, E. C. Ying, M. Chaparala, B. Behin, M. J. Daneman, and M. H. Kiang, “Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch,” J. Microelectromech. Syst. 14(2), 274–284 (2005). [CrossRef]

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