Depth-of-focus (DoF) analysis of a 193nm superlens imaging structure
Optics Express, Vol. 17, Issue 22, pp. 20538-20545 (2009)
http://dx.doi.org/10.1364/OE.17.020538
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Abstract
We present a design of a 193nm superlens imaging structure to enable the printing of 20nm features. Optical image simulations indicate that the 20nm resolution is feasible for both the periodic grating feature and the two-slit feature. Nominal depth-of-focus (DoF) position for both features is identified through the image contrast calculations. Simulations show that the two features have a common nominal dose at the nominal DoF to resolve 20nm critical dimension when a suitable dielectric material is placed between mask and superlens layer. A DoF of ~8nm is shown to be obtainable for the 20nm half-pitch grating feature while the respective DoF for the two-slit feature is less than 8nm which potentially can be enhanced by employing existing lithographic resolution enhancement techniques.
© 2009 OSA
OCIS Codes
(240.6680) Optics at surfaces : Surface plasmons
(110.4235) Imaging systems : Nanolithography
ToC Category:
Imaging Systems
History
Original Manuscript: June 18, 2009
Revised Manuscript: October 3, 2009
Manuscript Accepted: October 4, 2009
Published: October 23, 2009
Citation
Zhong Shi, Vladimir Kochergin, and Fei Wang, "Depth-of-focus (DoF) analysis of a 193nm superlens imaging structure," Opt. Express 17, 20538-20545 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-22-20538
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