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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 23 — Nov. 9, 2009
  • pp: 20762–20770

NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators

Romain Guider, Nicola Daldosso, Alessandro Pitanti, Emmanuel Jordana, Jean-Marc Fedeli, and Lorenzo Pavesi  »View Author Affiliations


Optics Express, Vol. 17, Issue 23, pp. 20762-20770 (2009)
http://dx.doi.org/10.1364/OE.17.020762


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Abstract

Si-based horizontal slot waveguides coupled to ring resonators have been fabricated and characterised. The central layer of the slot has been filled by Silicon nanocrystals (Si-nc) obtained by deposition of silicon rich silicon oxide and then thermal annealing. A comparison of various deposition and annealing parameters to form the Si-nc is performed. Propagation losses as low as 3 dB/cm and ring resonator quality factor of 30,000 have been achieved at 1550 nm.

© 2009 OSA

OCIS Codes
(230.5750) Optical devices : Resonators
(230.7370) Optical devices : Waveguides
(230.4555) Optical devices : Coupled resonators

ToC Category:
Optical Devices

History
Original Manuscript: September 21, 2009
Revised Manuscript: October 21, 2009
Manuscript Accepted: October 23, 2009
Published: October 28, 2009

Citation
Romain Guider, Nicola Daldosso, Alessandro Pitanti, Emmanuel Jordana, Jean-Marc Fedeli, and Lorenzo Pavesi, "NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators," Opt. Express 17, 20762-20770 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-23-20762


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