OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 17, Iss. 23 — Nov. 9, 2009
  • pp: 20762–20770

NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators

Romain Guider, Nicola Daldosso, Alessandro Pitanti, Emmanuel Jordana, Jean-Marc Fedeli, and Lorenzo Pavesi  »View Author Affiliations

Optics Express, Vol. 17, Issue 23, pp. 20762-20770 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (276 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Si-based horizontal slot waveguides coupled to ring resonators have been fabricated and characterised. The central layer of the slot has been filled by Silicon nanocrystals (Si-nc) obtained by deposition of silicon rich silicon oxide and then thermal annealing. A comparison of various deposition and annealing parameters to form the Si-nc is performed. Propagation losses as low as 3 dB/cm and ring resonator quality factor of 30,000 have been achieved at 1550 nm.

© 2009 OSA

OCIS Codes
(230.5750) Optical devices : Resonators
(230.7370) Optical devices : Waveguides
(230.4555) Optical devices : Coupled resonators

ToC Category:
Optical Devices

Original Manuscript: September 21, 2009
Revised Manuscript: October 21, 2009
Manuscript Accepted: October 23, 2009
Published: October 28, 2009

Romain Guider, Nicola Daldosso, Alessandro Pitanti, Emmanuel Jordana, Jean-Marc Fedeli, and Lorenzo Pavesi, "NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators," Opt. Express 17, 20762-20770 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. Proceeding of the IEEE special issue “Silicon Photonics,” Vol. 97, No. 7 (July 2009).
  2. Y. Vlasov and S. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 (2004). [CrossRef] [PubMed]
  3. K. Yamada, T. Tsuchizawa, T. Watanabe, J. Takahashi, E. Tamechika, M. Takahashi, S. Uchiyama, H. Fukuda, T. Shoji, S. Itabashi, and H. Morita, ““Microphotonics devices based on silicon wire waveguiding system,” IEICE Trans. Electron,” E 87–C, 351–357 (2004).
  4. S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003). [CrossRef] [PubMed]
  5. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004). [CrossRef] [PubMed]
  6. C. A. Barrios, “High performance all-optical silicon microswitch,” Electron. Lett. 40(14), 862–863 (2004). [CrossRef]
  7. C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007). [CrossRef] [PubMed]
  8. M. Lohmeyer, “Guided waves in rectangular integrated magneto-optic devices” (PhD thesis, 1999). www.home.math.utwente.nl/~hammer/Papers/phdth.pdf
  9. A. Farjadpour, D. Roundy, A. Rodriguez, M. Ibanescu, P. Bermel, J. D. Joannopoulos, S. G. Johnson, and G. Burr, “Improving accuracy by subpixel smoothing in FDTD,” Opt. Lett. 31, 2972–2974 (2006). [CrossRef] [PubMed]
  10. P. Sanchis, J. Blasco, A. Martinez, and J. Martì, “Design of silicon-based slot waveguide configurations for optimum nonlinear performance,” J. Lightwave Technol. 25(5), 1298–1305 (2007). [CrossRef]
  11. Y. Lebour, R. Guider, E. Jordana, J.-M. Fedeli, P. Pellegrino, S. Hernandez, B. Garrido, N. Daldosso, and L. Pavesi, “High quality coupled ring resonators based on silicon clusters slot waveguide,” Proc. of 5th IEEE Int. Conf. on Group IV Photonics, 215–217 (2008).
  12. N. Daldosso and L. Pavesi, “NanoSilicon for Photonics,” Laser Photonics Rev. 3, 508–534 (2009). [CrossRef]
  13. L. Pavesi, “Silicon-Based Light Sources for Silicon Integrated Circuits,” Adv. Opt. Technol. 2008, 416926 (2008).
  14. R. Spano, N. Daldosso, M. Cazzanelli, L. Ferraioli, L. Tartara, J. Yu, V. Degiorgio, E. Giordana, J. M. Fedeli, and L. Pavesi, “Bound electronic and free carrier nonlinearities in Silicon nanocrystals at 1550nm,” Opt. Express 17(5), 3941–3950 (2009). [CrossRef] [PubMed]
  15. D. Navarro-Urrios, A. Pitanti, N. Daldosso, F. Gorbilleau, R. Rizk, G. Pucker, and L. Pavesi, “Quantification of the carrier absorption losses in Si-nanocrystal rich rib waveguides at 1.54 μm,” Appl. Phys. Lett. 92(5), 051101 (2008). [CrossRef]
  16. E. Jordana, J.-M. Fedeli, P. Lyan, J. P. Colonna, P. Gautier, N. Daldosso, L. Pavesi, Y. Lebour, P. Pellegrino, B. Garrido, J. Blasco, F. Cuesta-Soto, and P. Sanchis, “Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications,” Proc. of 4th IEEE Int. Conf. on Group IV Photonics, 217–219 (2007).
  17. S. Hernandez, P. Pellegrino, A. Martinez, Y. Lebour, B. Garrido, R. Spano, M. Cazzanelli, N. Daldosso, L. Pavesi, E. Jourdana, and J. M. Fedeli, “Linear and nonlinear optical properties of Si-nanocrystals in SiO2 deposited by plasma-enhanced chemical-vapor deposition,” J. Appl. Phys. 103(6), 064309 (2008). [CrossRef]
  18. R. Sun, P. Dong, N. N. Feng, C. Y. Hong, J. Michel, M. Lipson, and L. Kimerling, “Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm,” Opt. Express 15(26), 17967–17972 (2007). [CrossRef] [PubMed]
  19. K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 (2009). [CrossRef] [PubMed]
  20. M. Borselli, T. J. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13(5), 1515–1530 (2005). [CrossRef] [PubMed]
  21. D. D. Smith, H. Chang, K. A. Fuller, A. T. Rosenberger, and R. W. Boyd, “Coupled-resonator-induced transparency,” Phys. Rev. A 69(6), 063804 (2004). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited